Micro-Electro-Mechanical Systems-based Gas Chromatography Columns with High Performance
Micro-Electro-Mechanical Systems-based Gas Chromatography Columns with High Performance
复制标题
基于微机电系统的高性能气相色谱柱
DOI：
10.3724/sp.j.1096.2010.00293
复制
发表时间：
2010-03
影响因子：
1.2
通讯作者：
Cui Da-Fu
中科院分区：
文献类型：
--
作者：
Li Hui;Zhang Yan-Ni;Chen Xing;Sun Jian-Hai;Ning Zhan-Wu;Cai Hai-Yuan;Zhang Lu-Lu;Ren Yan-Fei;Cui Da-Fu
介绍了一种基于微电子机械系统的气相色谱柱的制作和实验测试结果。与常规色谱柱相比，这种微型色谱柱具有体积小、分析速度快等特点，适合于在线分析和监测。采用深度反应离子刻蚀技术制作了0.5、1和3m的色谱柱，并通过动态涂覆工艺将固定相涂覆在固定相上。这些色谱柱很好地分离了小于200 S的苯、甲苯和邻二甲苯的混合物，其中，在3.0m的色谱柱上，甲苯和邻二甲苯的分离度达到14.3，产生了约6160个色板，考察并比较了不同柱长对分离性能的影响，这些色谱柱适用于环境分析、甲烷气体探针和国土安全等领域。
The fabrication and experimental test results were presented for a micro-electro-mechanical systems(MEMS)-based gas chromatography column.Compared with conventional column,this micro-gas chromatography column is suitable for on-line analysis and monitoring because of the small size,rapid analysis and other characteristics.These 0.5,1 and 3 m GC columns were fabricated using a deep reactive-ion etching(DRIE) and were coated the stationary phase via a dynamic coating procedure.These GC columns perfectly separated the mixture of benzene,toluene and o-xylene in less than 200 s,where,the 3.0 m of the GC column achieved a high resolution of 14.3 between toluene and o-xylene and yielded approximately 6160 plates.Moreover,the effect of separation performance for different column length were examined and compared.These GC columns are suitable for the application of a variety of disciplines,including environmental analysis,methane gas probes and homeland security.
登录
查看更多内容
DOI：
10.1002/mcs.10008
发表时间：
2001
期刊：
Journal of Microcolumn Separations
影响因子：
--
作者：
G. Spangler
通讯作者：
G. Spangler
影响因子：
2.7
作者：
Agah, M;Potkay, JA;Wise, KD
通讯作者：
Wise, KD
DOI：
10.1109/memsys.2003.1189769
发表时间：
2003-04
期刊：
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
影响因子：
--
作者：
J. Potkay;J. Driscoll;M. Agah;R. Sacks;K. Wise
通讯作者：
J. Potkay;J. Driscoll;M. Agah;R. Sacks;K. Wise
DOI：
10.1109/jmems.2002.805052
发表时间：
2002-12
期刊：
IEEE\/ASME Journal of Microelectromechanical Systems
影响因子：
--
作者：
H. Noh;P. Hesketh;G. Frye-Mason
通讯作者：
H. Noh;P. Hesketh;G. Frye-Mason
影响因子：
2.7
作者：
RESTON, RR;KOLESAR, ES
通讯作者：
KOLESAR, ES