Environmentally friendly patterning of molecular waterwheel (Noria) in supercritical carbon dioxide
Environmentally friendly patterning of molecular waterwheel (Noria) in supercritical carbon dioxide
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超临界二氧化碳中分子水车（Noria）的环保图案
DOI：
10.1039/b821475a
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发表时间：
2009
影响因子：
--
通讯作者：
C. Ober
中科院分区：
文献类型：
--
作者：
Manabu Tanaka;Abhinav Rastogi;Hiroto Kudo;D. Watanabe;T. Nishikubo;C. Ober
使用超临界二氧化碳（scCO 2）的环保显影工艺应用于由分子水车（“Noria”）制成的新型分子玻璃抗蚀剂，并通过电子束（EB）光刻进行图案化。Noria衍生物，叔丁氧羰基保护的Noria（'Noria-BOC'）的物理和光刻性能进行了检查，以评估它作为下一代抗蚀剂的溶解性，成膜能力，热稳定性，光敏性和图案化性能。FT-IR光谱和对比曲线研究分别揭示了Noria-BOC良好的光诱导脱保护反应性和scCO 2显影的优异负性特征。Noria-BOC的EB-图案化，随后在scCO 2中显影，给出了具有亚100 nm分辨率的清晰光刻图案。
An environmentally friendly development process using supercritical carbon dioxide (scCO2) was applied to a novel molecular glass resist made from a molecular waterwheel (‘Noria’), and patterned by electron-beam (EB) lithography. The physical and lithographic properties of a Noria derivative, tert-butoxycarbonyl-protected Noria (‘Noria-BOC’), were examined to evaluate it as a next-generation resist in terms of its solubility, film-forming ability, thermal stability, photosensitivity, and patterning properties. FT-IR spectra and contrast curve studies revealed the good photo-induced deprotection reactivity of Noria-BOC and the excellent negative-tone characteristics of scCO2 development, respectively. The EB-patterning of Noria-BOC followed by development in scCO2 gave clear lithographic patterns with sub-100 nm resolution.
使用超临界二氧化碳对分子玻璃进行高分辨率图案化
DOI：
--
发表时间：
2006
期刊：
Adv.Mater. 18・4
影响因子：
--
作者：
Felix;N.M.;Tsuchiya;K.;Ober;K.C.
通讯作者：
K.C.
影响因子：
--
作者：
Kudo, Hiroto;Watanabe, Daisuke;Ober, Christopher K.
通讯作者：
Ober, Christopher K.