Electric-Force Conversion Performance of Si-Based LiNbO(3) Devices Based on Four Cantilever Beams.
Electric-Force Conversion Performance of Si-Based LiNbO(3) Devices Based on Four Cantilever Beams.
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DOI：
10.3390/mi14111988
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发表时间：
2023-10-27
期刊：
影响因子：
3.4
通讯作者：
Geng W
中科院分区：
文献类型：
--
作者：
Zhang H;Qiao X;Wei H;Li X;Wu X;Yu N;Lu H;Guo T;Chou X;Geng W
在微米或纳米智能传感系统中，压电悬臂梁作为主要部件分布在微传感器、致动器和能量采集器中。研究了四种基于铌酸锂（LiNbO 3，LN）单晶材料逆压电效应的“电-力”转换悬臂梁器件的性能。提出了一种新的紧凑型压电智能器件模型，该模型被设计为由四个梁连接的单个质量块，其中器件具有较小的横向误差（0.39-0.41%）。通过施加激励信号，研究了悬臂梁的位移特性与驱动电压的关系。结果表明，器件在一阶固有频率fosc = 11.338 kHz处位移最大，位移与驱动电压呈良好的线性关系（R2 = 0.998）。相同幅值的方波信号具有更高的“电力”转换效率。输出位移可达12 nm，远高于正弦激励下的输出位移。此外，在电信号加载的多个循环下，器件的相对位移偏差可以保持在±1%以内。Si-LN铁电单晶悬臂梁器件具有小尺寸、高可靠性和超稳定性，具有较低的振动幅度，有望用于显微镜、诊断和高精度制造应用中的纳米定位技术。
In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with “electric-force” conversion based on the inverse piezoelectric effect of lithium niobate (LiNbO3, LN) single-crystal materials. A new compact piezoelectric smart device model is proposed, designed as a single mass block connected by four beams, where devices exhibit smaller lateral errors (0.39–0.41%). The relationship between the displacement characteristics of cantilever beams and driving voltage was researched by applying excitation signals. The results show that the device has the maximum displacement at a first-order intrinsic frequency (fosc = 11.338 kHz), while the displacement shows a good linear relationship (R2 = 0.998) with driving voltage. The square wave signals of the same amplitude have greater “electrical-force” conversion efficiency. The output displacement can reach 12 nm, which is much higher than the output displacement with sinusoidal excitation. In addition, the relative displacement deviation of devices can be maintained within ±1% under multiple cycles of electrical signal loading. The small size, high reliability, and ultra-stability of Si–LN ferroelectric single-crystal cantilever beam devices with lower vibration amplitudes are promising for nanopositioning techniques in microscopy, diagnostics, and high-precision manufacturing applications.
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