Pyramidal Structure Formation at the Interface between III/V Semiconductors and Silicon

Pyramidal Structure Formation at the Interface between III/V Semiconductors and Silicon
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III/V 半导体与硅界面处金字塔结构的形成

DOI:
10.1021/acs.chemmater.5b04896
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发表时间:
2016
影响因子:
8.6
通讯作者:
K. Volz
K. Volz
中科院分区:
材料科学2区
文献类型:
--
作者:
A. Beyer;A. Stegmüller;J. O. Oelerich;K. Jandieri;K. Werner;G. Mette;W. Stolz;S. Baranovski;R. Tonner;K. Volz

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根据摩尔定律,计算机性能的提高需要半导体器件的小型化。目前,它们的尺寸已达到纳米级。随着体积的减小,材料之间的界面变得越来越重要。这里显示了锥体界面结构是如何形成的,而不管在两个半导体生长过程中应用的条件如何。这彻底改变了人们对界面的普遍看法,人们认为界面要么是原子突变的,要么是相互扩散的。特别是在半导体异质外延中,通常假设一种原子的简单表面偏析。第一性原理计算和动力学模型证明了生长过程中的原子迁移率和界面的化学环境是实际结构形成的决定性因素。以生长在硅上的磷化镓为代表,研究了影响界面形貌的基本参数。除此之外,该系统对尖端电子和光电子器件具有重大影响。本研究的结果可以推广,以帮助进一步了解相关的半导体界面。这些知识对于理解当前和引导未来小型化设备的特性是至关重要的。
An enhancement of computer performance following Moore’s law requires the miniaturization of semiconductor devices. Presently, their dimensions reach the nanoscale. Interfaces between materials become increasingly important as the volume is reduced. It is shown here how a pyramidal interface structure is formed irrespective of the conditions applied during the growth of two semiconductors. This drastically changes the common view of interfaces, which were assumed to be either atomically abrupt or interdiffused. Especially in semiconductor heteroepitaxy, a simple surface segregation of one atomic species is often assumed. It is proven by first-principles computations and kinetic modeling that the atom mobility during growth and the chemical environment at the interface are the decisive factors in the formation of the actual structure. Gallium phosphide grown on silicon was chosen as representative, nearly unstrained material combination to study the fundamental parameters influencing the interface morphology. Beyond that, this system has significant impact for cutting-edge electronic and optoelectronic devices. The findings derived in this study can be generalized to aid the understanding of further relevant semiconductor interfaces. This knowledge is crucial to comprehend current and steer future properties of miniaturized devices.
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