A mathematical model for determining carbon coating thickness and its application in electron probe microanalysis
A mathematical model for determining carbon coating thickness and its application in electron probe microanalysis
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确定碳涂层厚度的数学模型及其在电子探针显微分析中的应用
DOI：
10.1017/s143192761601182x
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发表时间：
2016-11
影响因子：
2.8
通讯作者：
Yang Shui Yaun
中科院分区：
文献类型：
--
作者：
Zhang Ruo Xi;Yang Shui Yaun
在电子探针微量分析中，材料在分析之前涂覆有薄的导电碳涂层，从样品检测到的X射线强度可能在不同程度上受到碳涂层厚度的影响。样品和标准品之间碳膜厚度的差异可能导致分析结果的误差，特别是对于较低能量的X射线。在这项研究中，我们证明，相对于碳涂层室中的碳尖端的试样的位置和距离可以影响碳涂层过程中在试样表面上产生的碳膜的厚度。试样越靠近碳针尖接触点，沉积的碳膜越厚。基于碳原子在涂布过程中从碳尖端向各个方向均匀蒸发的假设，建立了计算涂布板上不同位置碳膜厚度的数学模型。为了减小碳涂层厚度的差异，我们建议将碳棒移动到较高的位置，将较薄的样品移动到涂布板的中心，将较厚的样品移动到涂布板的边缘，并且在涂布期间使用旋转的圆形涂布板。
In electron probe microanalysis where materials are coated with a thin conductive carbon coat before analysis, the X-ray intensity detected from a specimen may be affected to various degrees by the thickness of the carbon coating. Differences in the carbon film thickness between specimens and standards may lead to errors in analytical results, particular for lower energy X-rays. In this study, we demonstrate that the location and the distance of the specimen relative to the carbon tip in the coating chamber can affect the thickness of the carbon film produced on the specimen surface during carbon coating. The closer the specimen is to the carbon tip contacting point, the thicker is the carbon film deposited. A mathematical model to calculate the carbon film thickness at different locations on the coater plate is established, based on the assumption that carbon atoms evaporate from the carbon tip equally in all directions during the coating process. In order to reduce the differences in the carbon coating thickness, we suggest moving the carbon rod to a higher position, moving the thinner samples to the center and thicker samples to the edge of the coater plate, and using a rotating circular coater plate during coating.
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