On the Progress of Scanning Transmission Electron Microscopy (STEM) Imaging in a Scanning Electron Microscope
On the Progress of Scanning Transmission Electron Microscopy (STEM) Imaging in a Scanning Electron Microscope
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扫描电子显微镜中扫描透射电子显微镜（STEM）成像的进展
DOI：
10.1017/s1431927618000181
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发表时间：
2018
影响因子：
2.8
通讯作者：
D. Gerthsen
中科院分区：
文献类型：
--
作者：
C. Sun;E. Müller;M. Meffert;D. Gerthsen
具有低能电子的透射电子显微镜（TEM）已被认为是电子显微镜家族的重要补充，因为它可以避免撞击损伤并增加弱散射物体的对比度。扫描电子显微镜（sem）非常适合低能电子显微镜，其最大电子能为30 keV，但它们主要用于块状样品的形貌成像。扫描透射电子显微镜（STEM）探测器和电荷耦合器件相机的实现，用于获取轴上透射电子衍射（TED）模式，结合最近的分辨率改进，使得sem对一些传统上由TEM研究的电子透明样品的结构分析非常感兴趣。一个新的方面是在扫描电镜中从同一标本区域进行相关的SEM， STEM和TED成像，从而获得丰富的信息。同时图像采集提供了表面形貌、内部结构（包括晶体缺陷）和定性材料对比的信息。在亮场STEM成像中获得格条纹分辨率。扫描电镜中相关SEM/STEM/TED成像的好处通过对代表性样品类别（如纳米颗粒和块状材料）的结构分析来举例说明。
Transmission electron microscopy (TEM) with low-energy electrons has been recognized as an important addition to the family of electron microscopies as it may avoid knock-on damage and increase the contrast of weakly scattering objects. Scanning electron microscopes (SEMs) are well suited for low-energy electron microscopy with maximum electron energies of 30 keV, but they are mainly used for topography imaging of bulk samples. Implementation of a scanning transmission electron microscopy (STEM) detector and a charge-coupled-device camera for the acquisition of on-axis transmission electron diffraction (TED) patterns, in combination with recent resolution improvements, make SEMs highly interesting for structure analysis of some electron-transparent specimens which are traditionally investigated by TEM. A new aspect is correlative SEM, STEM, and TED imaging from the same specimen region in a SEM which leads to a wealth of information. Simultaneous image acquisition gives information on surface topography, inner structure including crystal defects and qualitative material contrast. Lattice-fringe resolution is obtained in bright-field STEM imaging. The benefits of correlative SEM/STEM/TED imaging in a SEM are exemplified by structure analyses from representative sample classes such as nanoparticulates and bulk materials.
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影响因子：
2.8
作者：
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DOI：
--
发表时间：
1993
期刊：
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影响因子：
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影响因子：
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作者：
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DOI：
--
发表时间：
2007
期刊：
影响因子：
--
作者：
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