A parallel acquisition charged particle energy analyser using a magnetic field
A parallel acquisition charged particle energy analyser using a magnetic field
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使用磁场的并行采集带电粒子能量分析仪
DOI：
10.1002/sia.6055
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发表时间：
2016
影响因子：
1.7
通讯作者：
Walker C
中科院分区：
文献类型：
--
作者：
Walker C
提出了一种新的带电粒子能量分析器。它广泛地基于180°磁谱仪，但旨在检测以螺旋运动移出色散平面的带电粒子。该分析仪有能力获得带电粒子能谱在一个大的能量范围内，类似于那些获得俄歇电子能谱，CA。2500 eV和大角度范围，高达90°，平行。这些条件更有利于在高真空下通过电子能谱法进行表面分析，其中例如0.2%至0.5%的电子能量分辨率是典型的。表达式示出了带电粒子在探测器上的着陆位置如何作为能量和极起飞角的函数而变化，以及在极起飞角的范围内的最佳能量分辨率的条件被确定。方程表明，一般情况下，该设备在大于180°的旋转角度获得最高的分辨率。设计简单，可以很容易地投入实践，使用现有的材料和技术，并被用来分析从放置在扫描电子显微镜样品发射的电子的能量。它可以与任何所需能量的初级电子束一起工作，并且可以适合样品和电子柱末端之间的小空间。然而，该装置难以改造成现有的SEM，并且理想地，SEM柱需要被设计成与分析仪相关联地工作。分析器的磁场方向与电子枪的轴线一致，使得初级束受磁场的影响很小，并且初级束电子柱中可以保持对称性。由于该装置旨在并行获取电子光谱，因此避免了由于分析仪中的斜变场而导致的初级束在样品上的任何移动。讨论了扫描电镜的视场和分析器对扫描电镜工作的影响。包括弹性峰和俄歇峰的光谱揭示了在900-eV电子能量下约4 eV的能量分辨率。版权所有© 2016约翰威利父子有限公司.
A new form of charged particle energy analyser is proposed. It is broadly based on the 180° magnetic spectrograph, but is intended to detect charged particles moving out of the dispersion plane with a helical motion. The analyser has the capability to acquire charged particle energy spectra over a large energy range, similar to those acquired in Auger electron spectroscopy, ca. 2500 eV and large angular range, up to 90°, in parallel. These conditions are more favourable for surface analysis by electron spectroscopy at high vacuum, where for example an electron energy resolution of 0.2% to 0.5% is typical. Expressions showing how the landing positions of the charged particles on the detector vary as a function of energy and polar take off angle are determined as well as the conditions for optimum energy resolution at a range of polar take off angles. The equations reveal that in general, the device obtains the highest resolution at angles of revolution greater than 180°. The design is simple and could be easily put into practice using available material and technologies and be used to analyse the energies of electrons emitted from a sample placed in a scanning electron microscope. It can be made to function with a primary electron beam of any desired energy and could fit in to the small space between the sample and the end of an electron column. However, the device is difficult to retrofit into existing SEMs and ideally an SEM column needs to be designed to work in association with the analyser. The direction of the magnetic field of the analyser is coincident with the axis of the electron gun so that the primary beam is little influenced by the magnetic field and symmetry can be maintained in the primary beam electron column. Because the device is intended to acquire electron spectra in parallel, any movement of the primary beam on the sample because of a ramping field in the analyser is avoided. The field of view and the effect of the analyser upon the operation of the SEM are discussed. Spectra including elastic and Auger peaks reveal an energy resolution of ~4 eV at 900‐eV electron energy. Copyright © 2016 John Wiley & Sons, Ltd.
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