Ion irradiation induced nucleation and growth of nanoparticles in amorphous silicon carbide at elevated temperatures

Ion irradiation induced nucleation and growth of nanoparticles in amorphous silicon carbide at elevated temperatures
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高温下离子辐照诱导非晶碳化硅中纳米颗粒的成核和生长

DOI:
10.1016/j.jnucmat.2018.04.005
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发表时间:
2018-07
影响因子:
3.1
通讯作者:
Wang Tieshan
Wang Tieshan
中科院分区:
工程技术2区
文献类型:
--
作者:
Zhang Limin;Jiang Weilin;Ai Wensi;Chen Liang;Wang Tieshan

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使用掠角入射 X 射线衍射 (GIXRD)、透射电子显微镜 (TEM) 和拉曼光谱研究了沉积态非晶 SiC 薄膜中离子辐照诱导的结晶。在 700K 下用 5MeV Xe 照射至注量为 1.15×1016Xe/cm2 时,3C-SiC 晶粒在整个膜厚度(~1μm)上均匀分布,平均晶粒尺寸为~5.7nm。成核和生长过程对每原子位移 (dpa) 的剂量表现出弱依赖性,范围从薄膜表面的~6 dpa 到 SiC/Si 界面的~20 dpa。在辐照薄膜中观察到同核 C-C 键从 sp3 杂化到 sp2 杂化的转变,这可能是观察到的晶粒尺寸饱和的部分原因。这项研究的结果可能会对碳化硅作为先进核能系统结构部件的应用产生重大影响。
Ion irradiation induced crystallization in as-deposited amorphous SiC films is investigated using grazing-angle incidence x-ray diffraction (GIXRD), transmission electron microscopy (TEM) and Raman spectroscopy. Irradiation with 5 MeV Xe to fluence of 1.15 × 1016Xe/cm2at 700 K results in a homogenous distribution of 3C-SiC grains with an average crystallite size of ∼5.7 nm over the entire film thickness (∼1 μm). The nucleation and growth processes exhibit a weak dependence on dose in displacements per atom (dpa) in the range from ∼6 dpa at the film surface to ∼20 dpa at the SiC/Si interface. A transformation of homonuclear C-C bonds from sp3to sp2hybridization is observed in the irradiated films, which may be partly responsible for the observed grain size saturation. The results from this study may have a significant impact on applications of SiC as structural components of advanced nuclear energy systems.
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