Surface modification of ZnO by plasma and laser treatment
Surface modification of ZnO by plasma and laser treatment
复制标题
通过等离子体和激光处理对 ZnO 进行表面改性
DOI：
10.1080/00150193.2017.1289587
复制
发表时间：
2017
期刊：
影响因子：
0.8
通讯作者：
S. Hirsch
中科院分区：
文献类型：
--
作者：
V. P. Afanasjev;N. V. Mukhin;D. N. Redka;Rudenko;E. I. Terukov;A. Oseev;S. Hirsch
研究了等离子体和激光处理前后玻璃基片上沉积的氧化锌薄膜的结构和光学性质。结果表明，改性激光辐照破坏了ZnO的多晶结构，而在光斑中心形成了非晶氧化锌。等离子体处理的ZnO层的表面形貌进行了改造，而不恶化其光学和电学性能。较长的处理时间导致表面的过度平坦化，随后是可观察到的光散射的减少，沿着是电子性质的劣化。
Structural and optical properties of zinc oxide thin films deposited on glass substrates were studied before and after plasma and laser treatment. It was shown that the polycrystalline ZnO structure was destroyed by modifying laser radiation, while in the center of the spot amorphous zinc oxide was formed. Plasma treatment performed a transformation of the surface morphology of ZnO layers without deterioration of their optical and electrical properties. Longer treatment times result in over flattening of the surface followed by observable reduction of light scattering along with degradation of electronic properties.
激光处理后ZnO薄膜的光学和结构性能
DOI：
--
发表时间：
2016
期刊：
影响因子：
--
作者：
V. Levitskii;Dmitrii Redka;E. Terukov
通讯作者：
E. Terukov
高效等离子体处理LPCVD ZnO表面改性
DOI：
--
发表时间：
2015
期刊：
影响因子：
--
作者：
D. Andronikov;A. Abramov;E. Terukov;A. Vinogradov;A. Ankudinov;V. Afanasjev
通讯作者：
V. Afanasjev