Effective light trapping in thin film silicon solar cells from textured Al doped ZnO substrates with broad surface feature distributions

Effective light trapping in thin film silicon solar cells from textured Al doped ZnO substrates with broad surface feature distributions
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具有宽表面特征分布的织构化 Al 掺杂 ZnO 基板在薄膜硅太阳能电池中的有效光捕获

DOI:
10.1063/1.4731775
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发表时间:
2012-06
影响因子:
4
通讯作者:
Zhao, Ying
Zhao, Ying
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Wang, Yanfeng;Zhang, Xiaodan;Bai, Lisha;Huang, Qian;Wei, Changchun;Zhao, Ying

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我们采用多步工艺制备了具有宽织构分布的掺铝氧化锌(AZO)薄膜,用于薄膜硅太阳电池的光捕获,该工艺包括AZO沉积、HCl刻蚀、AZO再沉积和HCl再刻蚀。由第一蚀刻产生的大特征为长波长光提供有效的光捕获;来自第二蚀刻的小特征增强了短波长光捕获。沉积在上述AZO上的微晶硅太阳能电池显示出改善的光电流密度,而没有开路电压和填充因子的损失,导致效率总体增加14.64%。
We used a multi-step process to make aluminum-doped ZnO (AZO) films with a wide range distribution of textures for light trapping in thin film silicon solar cells, which includes AZO deposition, HCl etching, AZO re-deposition, and HCl re-etching. The large features created by the first etching provide an effective light trapping for long wavelength light; the small features from the second etching enhances the short wavelength light trapping. Microcrystalline silicon solar cells deposited on the above-mentioned AZO show an improved photocurrent density without loss in the open-circuit voltage and fill factor, resulting in an overall increase in efficiency by 14.64%.
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