Piezo-actuated tunable diamond/AlN micro lenses
Piezo-actuated tunable diamond/AlN micro lenses
复制标题
压电驱动可调谐金刚石/AlN 微透镜
DOI：
10.1109/transducers.2013.6627269
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
V. Lebedev
中科院分区：
文献类型：
--
作者：
V. Zuerbig;D. Paetz;W. Pletschen;J. Hees;R. E. Sah;L. Kirste;N. Heidrich;V. Cimalla;C. Nebel;O. Ambacher;V. Lebedev
研究了基于掺硼纳米金刚石和氮化铝薄膜的可调谐微透镜。它表明，这样的材料组合是有利的高度透明的，机械稳定的光学元件，能够在高致动频率操作的制造。此外，它示出，径向分段AlN压电致动器允许自由的非球面变形的透镜表面。它使得能够在波前滤波器中或用于校正复杂光学系统中引起的像差的可调谐透镜的使用。
Tunable micro lenses based on boron-doped nanocrystalline diamond and aluminum nitride (AlN) thin films are investigated. It is demonstrated that such a material combination is advantageous for the fabrication of highly transparent, mechanically stable optical components capable to operate at high actuation frequencies. In addition, it is shown that radially segmented AlN piezo-actuators allow for free aspheric deformation of the lens surface. It enables the use of such tunable lenses either in wave front filters or for correction of aberrations induced in complex optical systems.
影响因子：
4
作者：
V. Lebedev;N. Heidrich;F. Knoebber;R. E. Sah;W. Pletschen;B. Raynor;V. Polyakov;V. Cimalla;O. Ambacher
通讯作者：
V. Lebedev;N. Heidrich;F. Knoebber;R. E. Sah;W. Pletschen;B. Raynor;V. Polyakov;V. Cimalla;O. Ambacher
影响因子：
3.5
作者：
Hees, J.;Heidrich, N.;Ambacher, O.
通讯作者：
Ambacher, O.