Advances in SAW gas sensors based on the condensate-adsorption effect.

Advances in SAW gas sensors based on the condensate-adsorption effect.
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基于冷凝吸附效应的声表面波气体传感器研究进展

DOI:
10.3390/s111211871
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发表时间:
2011
期刊:
Sensors (Basel, Switzerland)
影响因子:
--
通讯作者:
He S
He S
中科院分区:
其他
文献类型:
--
作者:
Liu J;Wang W;Li S;Liu M;He S

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研制了一种基于冷凝吸附效应检测的表面波(SAW)气体传感器,该传感器对挥发性有机物(VOCs)具有低检测限和快速响应的特点。在该传感器中,气相色谱柱作为分离元件,双谐振子作为检测元件。对于表面等效介电常数法,进行了与凝结吸附效应相关的响应机理分析,从而在制造之前对传感器的性能进行了预测。设计了新的声表面波谐振器作为振荡器的反馈,以降低插入损耗,实现单模控制,从而使振荡器具有更好的频率稳定性。基于这种新的相位调制方法,采用500 MHz双端口谐振器作为反馈元件的SAW振荡器获得了良好的短期频率稳定度(±3 Hz/S)。在研究甲醛检测的传感器实验中,所实现的SAW气体传感器具有良好的阈值检测限,最低可达0.38pg。
A surface-acoustic-wave (SAW) gas sensor with a low detection limit and fast response for volatile organic compounds (VOCs) based on the condensate-adsorption effect detection is developed. In this sensor a gas chromatography (GC) column acts as the separator element and a dual-resonator oscillator acts as the detector element. Regarding the surface effective permittivity method, the response mechanism analysis, which relates the condensate-adsorption effect, is performed, leading to the sensor performance prediction prior to fabrication. New designs of SAW resonators, which act as feedback of the oscillator, are devised in order to decrease the insertion loss and to achieve single-mode control, resulting in superior frequency stability of the oscillator. Based on the new phase modulation approach, excellent short-term frequency stability (±3 Hz/s) is achieved with the SAW oscillator by using the 500 MHz dual-port resonator as feedback element. In a sensor experiment investigating formaldehyde detection, the implemented SAW gas sensor exhibits an excellent threshold detection limit as low as 0.38 pg.
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影响因子: 8.4
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发表时间: 1987-03-01
影响因子: 3.6
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