Crystallization of amorphous SiC and superhardness effect in CrAlN/SiC nanomultilayered films
Crystallization of amorphous SiC and superhardness effect in CrAlN/SiC nanomultilayered films
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CrAlN/SiC纳米多层膜中非晶SiC的结晶及超硬度效应
DOI：
10.1016/j.surfcoat.2012.11.019
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发表时间：
2013-01
影响因子：
5.4
通讯作者：
He, Daihua1
中科院分区：
文献类型：
--
作者：
Li, Wei1;Liu, Ping1;Zhao, Yongsheng2;Ma, Fengcang1;Liu, Xinkuan1;Chen, Xiaohong1;He, Daihua1
采用反应磁控溅射法合成了一系列不同SiC层厚度的CrAlN/SiC纳米多层膜。通过X射线衍射（XRD）、场发射扫描电子显微镜（FESEM）、高分辨率透射电子显微镜（HRTEM）和纳米压痕技术研究了微观结构和机械性能。结果表明，当SiC层厚度小于0.8nm时，非晶SiC层在CrAlN层的模板作用下被迫结晶，并与CrAlN层外延生长，导致力学性能异常增强。当SiC层厚度为0.8nm时，最大硬度和弹性模量分别达到35.4GPa和431GPa。随着SiC层厚度的进一步增加，SiC层变回非晶态，纳米多层膜的共格生长结构被破坏，导致硬度和弹性模量下降。
A series of CrAlN/SiC nanomultilayers with different SiC layer thickness were synthesized by reactive magnetron sputtering. The microstructure and mechanical properties were investigated by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM) and nano-indentation techniques. The results indicated that, when SiC layer thickness was less than 0.8nm, amorphous SiC layers were forced to crystallize under the template effect of CrAlN layers and grew epitaxially with CrAlN layers, resulting in abnormal enhancement of mechanical properties. The maximum hardness and elastic modulus could respectively reach 35.4GPa and 431GPa when SiC layer thickness was 0.8nm. With further increase of SiC layer thickness, SiC layers changed back to amorphous state and broken coherent growth structure of nanomultilayers, leading to the decrease of hardness and elastic modulus.
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影响因子：
3
作者：
Jian-ling Yue;Wenjie Zhao;Geyang Li;Wei Gao
通讯作者：
Jian-ling Yue;Wenjie Zhao;Geyang Li;Wei Gao
影响因子：
1.7
作者：
M. Kong;Jian-ling Yue;Geyang Li
通讯作者：
M. Kong;Jian-ling Yue;Geyang Li
影响因子：
5
作者：
P. Narasimman;M. Pushpavanam;V. Periasamy
通讯作者：
P. Narasimman;M. Pushpavanam;V. Periasamy
影响因子：
6.7
作者：
Guanqun Li;Yuge Li;Geyang Li
通讯作者：
Guanqun Li;Yuge Li;Geyang Li
DOI：
10.1016/j.ijrmhm.2005.11.005
发表时间：
2006-01-01
影响因子：
3.6
作者：
Kalss, W.;Reiter, A.;Endrino, J. L.
通讯作者：
Endrino, J. L.