Ternary and quarternary TiBN and TiBCN nanocomposite coatings deposited by arc ion plating
Ternary and quarternary TiBN and TiBCN nanocomposite coatings deposited by arc ion plating
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电弧离子镀沉积三元和四元 TiBN 和 TiBCN 纳米复合涂层
DOI：
10.1016/j.surfcoat.2018.12.081
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发表时间：
2019-02
影响因子：
5.4
通讯作者：
Su F. H.
中科院分区：
文献类型：
--
作者：
Tian C. X.;Wang Z. S.;Zou C. W.;Tang X. S.;Xie X.;Li S. Q.;Liang F.;Li Z. J.;Liu Y. F.;Su F. H.
二元TiN单层涂层不能满足工业应用的要求。改善其性能的一种途径是添加新元素：硅、硼或碳。因此，这项工作的主要目标是制备具有纳米复合结构的TiBN和TiBCN涂层，该涂层具有更高的显微硬度和更好的耐磨性。采用电弧离子镀方法在Si(100)和硬质合金衬底上沉积TiBN和TiBCN涂层。TiBN纳米复合涂层是在纯N_2中用TiB_2复合靶沉积的，而TiBCN涂层是在C_2H_2和N_2混合气体中沉积的。研究了纳米复合涂层的成分、显微组织和力学性能。TiBN涂层由晶相TiN、TiB2和非晶态BN组成。在0.5 PaN_2压力下，显微硬度达到最大值，约为3160 HV，且显微硬度与N_2压力有很好的相关性。采用N_2和C_2H_2工艺制备的TiBCN涂层为纳米晶TiN和TiB_2，形态为C、CN和BN的纳米复合结构。在C_2H_2和N_2气体流量比为1/2时，TiBCN涂层的显微硬度比TiBN低，最低可达1761 HV。对于磨削硬质合金，随着C_2H_2和N_2流量比的增加，TiBN涂层的摩擦系数接近0.4，而TiBCN涂层的摩擦系数降低了0.2。
Binary TiN monolayer coating cannot meet the demands of the industrial application. a route for improving its performance is the addition of new element: silicon, boron or carbon. Therefore the main objective of this work is the preparation of TiBN and TiBCN coatings with a nanocomposite structure offering a higher micro-hardness as well as an improved wear resistance. Arc ion plating was used for the deposition of the TiBN and TiBCN coatings on Si (100) and cemented carbide substrates. TiBN nanocomposites coatings was deposited using TiB2composite target in pure N2whereas for TiBCN coatings was in mixed C2H2and N2. The components, microstructure and mechanical properties behavior of the nanocomposite coatings were investigated. TiBN coatings consisted of the crystalline phases TiN, TiB2and amorphous BN. A maximum micro-hardness of about 3160 HV was observed at a 0.5 Pa N2pressure while the micro-hardness correlates well with N2pressure. TiBCN coatings prepared with the N2and C2H2process exhibit a nanocomposite structure of nanocrystalline TiN and TiB2, morphous C, CN and BN. Compared to TiBN, lower micro-hardness of the TiBCN coatings down to 1761 HV was measured for at 1/2 gas flow ratio of C2H2and N2. For grinding material cemented carbide, the friction coefficient of TiBN coating was nearly 0.4 while the friction coefficient of TiBCN coatings was lower 0.2 with the increasing of C2H2and N2flow ratio.
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影响因子：
5.4
作者：
Jianliang Lin;R. Wei;F. Ge;Y. Li;Xuhai Zhang;F. Huang;M. Lei
通讯作者：
Jianliang Lin;R. Wei;F. Ge;Y. Li;Xuhai Zhang;F. Huang;M. Lei
原位离子束系统离子束分析线仪器仪表及应用
影响因子：
2.8
作者：
Huang Zhi-Hong;Zhang Zao-Di;Wang Ze-Song;Wang Lang-Ping;Fu De-Jun
通讯作者：
Fu De-Jun
影响因子：
4.1
作者：
Xiangyang Chen;Zeng-kun Wang;Shengli Ma;V. Ji
通讯作者：
Xiangyang Chen;Zeng-kun Wang;Shengli Ma;V. Ji
DOI：
10.1016/s1003-6326(12)61794-4
发表时间：
2012-12
影响因子：
4.5
作者：
Jung-Hoo Shin;Kwangsoo Choi;T. Wang;K. Kim;R. Nowak
通讯作者：
Jung-Hoo Shin;Kwangsoo Choi;T. Wang;K. Kim;R. Nowak
影响因子：
2.1
作者：
PELLEG, J;ZEVIN, LZ;CROITORU, N
通讯作者：
CROITORU, N