Detective quantum efficiency of electron area detectors in electron microscopy.

Detective quantum efficiency of electron area detectors in electron microscopy.
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DOI:
10.1016/j.ultramic.2009.04.002
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发表时间:
2009-08
期刊:
影响因子:
2.2
通讯作者:
Faruqi, A. R.
Faruqi, A. R.
中科院分区:
工程技术3区
文献类型:
--
作者:
McMullan, G.;Chen, S.;Henderson, R.;Faruqi, A. R.

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检测器设计的最新进展使人们需要对现有电子检测器的调制转移函数(MTF)和分辨率依赖的侦探量子效率(DQE)与基于新技术的检测器进行仔细的比较目前针对四种检测器的MTF和DQE测量值:Kodak SO-163胶卷,TVIPS 224电荷耦合设备(CCD)检测器,Medipix2混合像素检测器和一个实验直接的单层活性像素传感器(地图)检测器和CCD性能在120和300 keV下测量,而在120 keV的Medipix2和300 kev的地图检测器中呈现了结果。已经研究了持有人和塑料支撑的电子反向散射的影响。支持膜的计算机模拟和地图检测器已进行在300凯夫的电影。
Recent progress in detector design has created the need for a careful side-by-side comparison of the modulation transfer function (MTF) and resolution-dependent detective quantum efficiency (DQE) of existing electron detectors with those of detectors based on new technology. We present MTF and DQE measurements for four types of detector: Kodak SO-163 film, TVIPS 224 charge coupled device (CCD) detector, the Medipix2 hybrid pixel detector, and an experimental direct electron monolithic active pixel sensor (MAPS) detector. Film and CCD performance was measured at 120 and 300 keV, while results are presented for the Medipix2 at 120 keV and for the MAPS detector at 300 keV. In the case of film, the effects of electron backscattering from both the holder and the plastic support have been investigated. We also show that part of the response of the emulsion in film comes from light generated in the plastic support. Computer simulations of film and the MAPS detector have been carried out and show good agreement with experiment. The agreement enables us to conclude that the DQE of a backthinned direct electron MAPS detector is likely to be equal to, or better than, that of film at 300 keV.
影响因子: 1.4
作者:
McMullan, G.;Faruqi, A. R.
通讯作者: Faruqi, A. R.
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