Microscopic analysis of carbon phases induced by femtosecond laser irradiation on single-crystal SiC
Microscopic analysis of carbon phases induced by femtosecond laser irradiation on single-crystal SiC
复制标题
飞秒激光照射单晶 SiC 诱导碳相的显微分析
DOI：
10.1007/s00339-010-5786-x
复制
发表时间：
2010
期刊：
影响因子：
--
通讯作者：
A. Yoshida
中科院分区：
文献类型：
--
作者：
T. Tomita;T. Okada;H. Kawahara;Ryota Kumai;S. Matsuo;S. Hashimoto;M. Kawamoto;M. Yamaguchi;S. Ueno;Emi Shindou;A. Yoshida
利用透射电子显微镜和拉曼光谱对飞秒激光诱导改性区进行了元素分析。在激光光斑周围形成精细波纹的区域，a-SiC的相对拉曼强度较高。相反，a-Si的相对拉曼强度在形成粗纹的中心区域较高。这一结果表明，在高注量区发生了强烈的物质迁移。另一方面，激光诱导周期性结构最顶层非晶层的碳原子的映射没有显示出任何明显的偏析。此外，拉曼光谱分析表明，碳的微区尺寸很小(~lt；1 nm)。根据这些事实，发现碳原子均匀分布在最上层的非晶层中，并无规律地连接在一起，没有形成任何可观察到的细小颗粒。
Elemental analysis of femtosecond laser-induced modified region was carried out by transmission electron microscopy and Raman spectroscopy. The relative Raman intensities of a-SiC were higher in the peripheral region of laser irradiated spot where the fine ripple was formed. On the contrary, the relative Raman intensities of a-Si were higher in the central region where the coarse ripple was formed. This result suggests that the material migration has strongly occurred in the higher fluence region. On the other hand, the mapping of carbon atoms in the topmost amorphous layer of laser induced periodic structures did not show any significant segregation. In addition, Raman spectroscopic analysis showed that the domain size of carbon was very small (< 1 nm). From these facts, it was found that the carbon atoms were uniformly distributed in the topmost amorphous layer and were randomly connected without forming any observable fine particles.
影响因子：
1.5
作者：
T. Tomita;K. Kinoshita;S. Matsuo;S. Hashimoto
通讯作者：
T. Tomita;K. Kinoshita;S. Matsuo;S. Hashimoto
DOI：
10.1007/s00339-002-1979-2
发表时间：
2003-04-01
影响因子：
2.7
作者：
Yasumaru, N;Miyazaki, K;Kiuchi, J
通讯作者：
Kiuchi, J
DOI：
--
发表时间：
2006
期刊：
影响因子：
--
作者：
K. Kimura;J. Kanasaki;K. Tanimura
通讯作者：
K. Tanimura