High-Sensitivity Air-Coupled Megahertz-Frequency Ultrasound Detection Using On-Chip Microcavities
High-Sensitivity Air-Coupled Megahertz-Frequency Ultrasound Detection Using On-Chip Microcavities
复制标题
使用片上微腔的高灵敏度空气耦合兆赫兹频率超声波检测
DOI：
10.1103/physrevapplied.18.034035
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发表时间：
2022-09
影响因子：
4.6
通讯作者：
Bei-Bei Li
中科院分区：
文献类型：
--
作者：
Hao Yang;Zhi-Gang Hu;Yuechen Lei;Xuening Cao;Min Wang;Jialve Sun;Zhanchun Zuo;Changhui Li;Xiulai Xu;Bei-Bei Li
由于其双共振增强灵敏度，腔光机械系统为超声传感提供了理想的平台。在这项工作中，我们实现了基于低语通道模式微腔的高灵敏度空气耦合超声在千赫兹到兆赫兹频率范围内的传感。使用具有高光学Q因子（约${10}^{7}$）和机械Q因子（约$700$）的$57$-$ensuremath{mu} mathm {m}$直径微环，我们实现了$46phantom{rule{0.2em}{0ex}}ensuremath{mu} mathm {Pa}$ ${mathm {Hz}}^{ensuremath{-}1/2}$- 10 mPa ${mathm {Hz}}^{ensuremath{-}1/2}$在0.25—3.2 MHz频率范围内的灵敏度。在0.6 MHz的频率范围内，在2.56 MHz的机械共振周围实现热噪声限制灵敏度。我们还观察了二阶和三阶机械边带，并定量研究了每个机械边带的强度作为机械位移的函数。测量所有边带的信噪比组合有可能扩展超声传感的动态范围。
Owing to their dual-resonance enhanced sensitivity, cavity optomechanical systems provide an ideal platform for ultrasound sensing. In this work, we realize high-sensitivity air-coupled ultrasound sensing from kilohertz to megahertz frequency range based on whispering gallery mode microcavities. Using a $57$-$ensuremath{mu}mathrm{m}$-diameter microtoroid with high optical Q factor (approximately ${10}^{7}$) and mechanical Q factor (approximately $700$), we achieve sensitivities of $46phantom{rule{0.2em}{0ex}}ensuremath{mu}mathrm{Pa}$ ${mathrm{Hz}}^{ensuremath{-}1/2}$--10 mPa ${mathrm{Hz}}^{ensuremath{-}1/2}$ in a frequency range of 0.25--3.2 MHz. Thermal-noise-limited sensitivity is realized around a mechanical resonance at 2.56 MHz, in a frequency range of 0.6 MHz. We also observe the second- and third-order mechanical sidebands, and quantitatively study the intensities of each mechanical sideband as a function of the mechanical displacement. Measuring the combination of signal-to-noise ratios at all sidebands has the potential to extend the dynamic range of ultrasound sensing.
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影响因子：
16.6
作者：
Yu W;Jiang WC;Lin Q;Lu T
通讯作者：
Lu T
影响因子：
4.6
作者：
Li H;Dong B;Zhang Z;Zhang HF;Sun C
通讯作者：
Sun C
影响因子：
4.6
作者：
Zhu J;Zhao G;Savukov I;Yang L
通讯作者：
Yang L
影响因子：
3.3
作者：
Schliesser, A.;Anetsberger, G.;Kippenberg, T. J.
通讯作者：
Kippenberg, T. J.
影响因子：
35
作者：
Fischer, Balthasar
通讯作者：
Fischer, Balthasar