Finline-integrated cold electron bolometer

Finline-integrated cold electron bolometer
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Finline 集成冷电子测辐射热计

DOI:
10.1117/12.858263
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发表时间:
2010
期刊:
--
影响因子:
--
通讯作者:
Otto E
Otto E
中科院分区:
--
文献类型:
--
作者:
Otto E

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冷电子测辐射热计(CEB)是一种敏感的毫米波探测器,易于与超导平面电路集成。CEB探测器还具有其他重要特征,如高饱和功率和非常快的响应。我们已经制作并测试了集成在硅衬底上的单边鳍线狭缝上的CEB探测器。测辐射热计采用两种制作方法:电子束直写三层膜技术和先进的荫罩蒸发技术。在280mK的恒温箱中测试了CEB的性能。在电流偏置模式下测量了直流I-V曲线和温度响应,并使用工作在110 GHz的IMPATT二极管对光学响应进行了初步测量。这些测试是通过将电源直接耦合到鳍线芯片来进行的,而不使用波导或馈电喇叭。采用标准直写工艺制作的器件,测辐射热计暗噪声等效功率约为5×10-16W/√Hz,而荫罩蒸发工艺器件的暗NEP值估计低至3×10-17W/√Hz。
The Cold-Electron Bolometer (CEB) is a sensitive millimetre-wave detector which is easy to integrate with superconducting planar circuits. CEB detectors have other important features such as high saturation power and very fast response. We have fabricated and tested CEB detectors integrated across the slot of a unilateral finline on a silicon substrate. Bolometers were fabricated using two fabrication methods: e-beam direct-write trilayer technology and an advanced shadow mask evaporation technique. The CEB performance was tested in a He3sorption cryostat at a bath temperature of 280mK. DC I-V curves and temperature responses were measured in a current bias mode, and preliminary measurements of the optical response were made using an IMPATT diode operating at 110GHz. These tests were conducted by coupling power directly into the finline chip, without the use of waveguide or feedhorns. For the devices fabricated in standard direct-write technology, the bolometer dark electrical noise equivalent power is estimated to be about 5×10-16W/√Hz, while the dark NEP value for the shadow mask evaporation technique devices is estimated to be as low as 3×10-17W/√Hz.
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DOI: --
发表时间: 2003
期刊: SPIE Astronomical Telescopes + Instrumentation
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发表时间: 2001-06-01
影响因子: 3.2
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