Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm.
Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm.
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DOI：
10.1038/s41378-020-00214-1
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发表时间：
2020
影响因子：
7.9
通讯作者：
Kraft M
中科院分区：
文献类型：
--
作者：
Wang C;Song X;Fang W;Chen F;Zeimpekis I;Wang Y;Quan A;Bai J;Liu H;Schropfer G;Welham C;Kraft M
本文介绍了一种新的，半自动化的设计方法的基础上，遗传算法（GA）使用自由形状的微机电系统（MEMS）器件的几何形状。所提出的方法可以设计包括自由形状几何形状的MEMS器件，并优化这种MEMS器件以提供高灵敏度、大带宽和大制造公差。所提出的方法不需要太多的计算时间或内存。自由几何形状的使用允许在设计过程中有更多的自由度，提高了MEMS器件的多样性和性能。一个MEMS加速度计包括一个机械运动放大器，以证明设计方法的有效性。实验结果表明，改进的产品的灵敏度和带宽的100%和灵敏度的141%的改进相比，与传统的正交形状设计的设备的情况下。此外，实现了对制造公差和参数失配的优异的免疫力。基于遗传算法，使用自由形状的几何形状，一种新颖的，功能强大的，半自动化的设计方法已经被设计出来，可以应用到广泛的微机电系统（MEMS）设备。MEMS器件由于其小尺寸和低成本而在许多领域得到了广泛的应用，但传统的简单设计往往限制了它们的性能。由中国浙江大学的Jian Bai和比利时鲁汶大学的Michael Kraft领导的团队开发了一种设计MEMS器件的方法，其中自由几何形状的使用在设计过程中提供了更大的自由度，从而提高了器件的多样性和性能。实验结果表明，与传统设计的器件相比，灵敏度提高了141%。作者认为，他们的方法可以应用于许多MEMS器件，并产生具有更高性能的非常规几何形状。
This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved. Based on a genetic algorithm using freeform geometries, a novel, powerful, semi-automated design methodology has been devised that can be applied to a wide range of micro-electrical-mechanical system (MEMS) devices. Thanks to their small size and low cost, MEMS devices find wide application in many areas, but the conventional, simple designs of the devices often limit their performance. A team headed by Jian Bai at Zhejiang University, China and Michael Kraft at University of Leuven, Belgium, has developed a method for designing MEMS devices in which the use of freeform geometries offers greater freedom in the design process, thereby enhancing the diversity and performance of the devices. The experimental results indicated a sensitivity improvement of 141% compared with a conventionally designed device. The authors believe that their methodology can be applied to many MEMS devices and result in unconventional geometric shapes with higher performance.
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影响因子：
2.7
作者：
Khan, Sambuddha;Ananthasuresh, G. K.
通讯作者：
Ananthasuresh, G. K.
DOI：
10.1088/0960-1317/26/1/015008
发表时间：
2016-01-01
影响因子：
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作者：
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通讯作者：
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影响因子：
6.4
作者：
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通讯作者：
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