Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets

Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets
复制标题

不锈钢溅射蚀刻微细突起的形成及纤维片夹持能力的评价

DOI:
10.1007/s12541-021-00495-0
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发表时间:
2021
影响因子:
1.9
通讯作者:
Tsunetaka Sumomogi
Tsunetaka Sumomogi
中科院分区:
工程技术4区
文献类型:
--
作者:
Masayoshi Nakamura;Keijiro Nakasa;Yudai Kitamika;Sande Gao;Tsunetaka Sumomogi

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采用射频磁控溅射装置,在功率为250 W、时间为14.4 ks的条件下,对AISI 420不锈钢进行了氩离子溅射刻蚀,形成了底部直径为10-20 μm的锥形凸起。溅射蚀刻也应用于AISI型316不锈钢在250 W下10.8 ks,并形成直径小于500 nm的细柱状突起。另外,使用混合有0.67Pa氩气的0.53Pa氮气,以50 W的功率对420型钢的突起施加等离子体渗氮1.8ks。通过对三种类型的纤维片材的摩擦试验来测量突起的夹持能力。对于棉布,溅射蚀刻和等离子体氮化的420型钢试样的摩擦系数在0.8kPa的标称压缩应力下为1.3和1.7,而溅射蚀刻的316型钢试样的摩擦系数为1.0。这些比用#100砂纸抛光和用氧化铝粉末抛光的样品的0.8和0.5大得多。此外,对于微纤维和聚酯纤维片材,具有突起的试样显示出比机械抛光的试样更高的夹持能力。突出物样品的大的夹持能力的原因是由于突出物在编织纱线之间和编织纱线中的刺穿。
Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel at 250 W for 10.8 ks, and fine column-shaped protrusions with diameters smaller than 500 nm were formed. In addition, plasma-nitriding was applied to the protrusions of type 420 steel using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. The gripping ability of protrusions was measured by friction tests for three types of fiber sheets. For a cotton cloth, the friction coefficients of the as-sputter-etched and plasma-nitrided type 420 steel specimens were 1.3 and 1.7 at a nominal compressive stress of 0.8 kPa, and that of the as-sputter-etched type 316 steel specimen was 1.0. These are much larger than 0.8 and 0.5 of the specimens polished with #100 emery paper and buff-polished with alumina powders. Also for microfiber and polyester fiber sheets, the specimen with protrusions showed a higher gripping ability than those of the mechanically polished specimens. The reason for the large gripping ability of protrusion specimens is due to piercing of the protrusions between and into weaving yarns.
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