Calibration methods for a dual-wavelength interferometer system
Calibration methods for a dual-wavelength interferometer system
复制标题
双波长干涉仪系统的校准方法
DOI：
10.1117/12.2323127
复制
发表时间：
2018
期刊：
影响因子：
--
通讯作者：
Ellis, Jonathan D.
中科院分区：
文献类型：
--
作者：
Zhang, Yanqi;Tangari Larrategui, Martin;Brown, Thomas G.;Ellis, Jonathan D.
长期以来，多波长干涉测量一直被认为是测量大非球面斜率偏差的一种选择。特别是，合成波长提供了多种方法，通过这些方法可以解开较大的相位漂移。使用多个波长可能会在光束扩展和传输过程中出现的各个波长之间产生准直和放大失配误差。在这里，我们提出和分析了双波长干涉仪的对准和校准方法，这种方法可以显著降低系统中的未对准误差和色差。为了校正失调，描述了一种双波长干涉仪对准的一般方法，包括激光器、扩束器、用于合成光束和补偿参考面误差的分束器的对准以及条纹成像系统的对准。在探测器表面进行了傅里叶变换测试，验证了由于光学系统不对准导致的两个波长之间基本上没有放大倍数的差异。针对系统中光学元件引入的色差，建立了干涉仪的光线跟踪模型，模拟了光学元件对测量结果的色差影响。作为实验测试，我们使用高混叠干涉图检测了非零位条件下的离轴球面反射镜。在仿真系统误差的基础上对上述对准方法和结果进行了分析。利用这种方法，我们证明了λ/25偏差的测量表面轮廓与用斐索干涉仪直接测量的轴向表面轮廓相当。
Multiple wavelength interferometry has long been considered an option for the measurement of large aspheric slope departures. In particular, a synthetic wavelength offers a variety of approaches by which large phase excursions can be unwrapped. Using multiple wavelengths can create collimation and magnification mismatch errors between the individual wavelengths that arise during beam expansion and propagation. Here, we present and analyze alignment and calibration methods for a dual-wavelength interferometer that can significantly reduce both misalignment errors and chromatic aberrations in the system. To correct for misalignment, a general method is described for the alignment of a dual-wavelength interferometer, including the alignment of lasers, beam expanders, beam splitters for combining beams and for compensating errors in the reference surface, and the fringe imaging system. A Fourier transform test at the detector surface was conducted to validate that there is essentially no magnification difference between two wavelengths resulting from misalignment of optical system. For the chromatic aberration introduced by the optical elements in the system, a ray-trace model of the interferometer has been established, to simulate the chromatic effect that optical elements will have on the measurement results. As an experimental test, we examine an off-axis spherical mirror in a non-null condition using a highly aliased interferogram. The above alignment methods and the results are analyzed based on the simulated system errors. Using this method, we demonstrate a measured surface profile of deviation of λ/25 which is comparable to a direct measurement profile of the surface on axis using a Fizeau interferometer.
DOI：
10.1117/12.964494
发表时间：
1986-11
期刊：
--
影响因子：
--
作者：
K. Creath;J. Wyant
通讯作者：
K. Creath;J. Wyant
DOI：
10.1136/ebmh.11.4.102
发表时间：
2008-10
期刊：
Evidence Based Mental Health
影响因子：
--
作者：
P. Cochat;L. Vaucoret;J. Sarles
通讯作者：
P. Cochat;L. Vaucoret;J. Sarles
使用光学轮廓仪测量台阶高度
DOI：
10.1117/12.938629
发表时间：
1986
期刊：
The Journal of laboratory and clinical medicine
影响因子：
--
作者：
K. Creath
通讯作者：
K. Creath