Nitriding of a tool steel with an electron-beam-excited plasma
Nitriding of a tool steel with an electron-beam-excited plasma
复制标题
用电子束激发等离子体对工具钢进行氮化
DOI：
10.1116/1.2338563
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
T. Goto
中科院分区：
文献类型：
--
作者：
H. Shoyama;T. Hishida;T. Hara;Y. Dake;Takashi Mori;H. Nagai;M. Hori;T. Goto
采用电子束激励等离子体（EBEP）对工具钢进行渗氮。EBEP是在10−3- 101 Pa的压强范围内，通过电子碰撞电离，用高能电子束维持的。将其温度由电辐射加热器控制的样品暴露于EBEP。SKD 61工具钢在800 K、3 h的渗氮温度下，渗氮层厚度可达100μm，表面硬度可达1000 HV（0.1）。为了测量EBEP中氮原子的密度，使用了真空紫外吸收光谱系统。结果表明，随着电子束流从2A增加到20 A，氮原子密度从1011增加到1012 cm-3，呈线性关系。
Nitriding of a tool steel was carried out with an electron-beam-excited plasma (EBEP). EBEP is sustained with energetic electron beams over the pressure range of 10−3–101Pa by electron-impact ionization. Samples whose temperatures were controlled by electric radiant heater were exposed to EBEP. A nitrided layer of 100μm and a surface hardness of 1000HV(0.1) were achieved for tool steel SKD61 (JIS) at 800K and a treatment time of 3h. In order to measure the density of nitrogen atoms in EBEP, a vacuum ultraviolet absorption spectroscopy system was used. It was found that the density of nitrogen atoms increased from 1011to1012cm−3 linearly with an increase of electron beam current from 2to20A.
影响因子：
3.2
作者：
Tada, S;Takashima, S;Sakamoto, Y
通讯作者：
Sakamoto, Y
开发真空紫外吸收光谱技术，采用氮分子微放电空心阴极灯测量等离子体中氮原子的绝对密度
DOI：
--
发表时间：
2001
期刊：
影响因子：
--
作者：
S. Takashima;S. Arai;M. Hori;T. Goto;A. Kono;Masafumi Ito;K. Yoneda
通讯作者：
K. Yoneda