Fabrication and Characterization of GaN-Based Resonant-Cavity Light-Emitting Diodes with Dielectric and Metal Mirrors

Fabrication and Characterization of GaN-Based Resonant-Cavity Light-Emitting Diodes with Dielectric and Metal Mirrors
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具有电介质和金属镜的 GaN 基谐振腔发光二极管的制造和表征

DOI:
10.1149/2.0221803jss
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发表时间:
2018
期刊:
ECS Journal of Solid State Science and Technology,
影响因子:
--
通讯作者:
B. P. Zhang
B. P. Zhang
中科院分区:
其他
文献类型:
--
作者:
L. M. Zhou;B. C. Ren;Z. W. Zheng;L. Y. Ying;H. Long;B. P. Zhang

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我们展示了GaN基谐振腔发光二极管(RCLED)的铜基板上制造的电镀和激光剥离技术。采用TiO 2/SiO2介质分布布拉格反射器(DBR)和铝金属反射器分别作为顶部和底部反射镜。与没有顶部反射镜的传统LED相比,由于谐振腔效应,RCLED器件实现了性能的改善。我们还研究了顶部TiO 2/SiO 2介电DBR对器件特性的影响。通过调节顶部介质DBR的反射率,当顶部介质DBR的反射率为55%时,RCLED器件的输出功率为62 mW,外量子效率为14.8%,发射光谱半高宽为12 nm,50%视角为122 nm,-3 dB调制带宽为48 MHz。结果表明,具有最佳反射器的RCLED器件具有相当大的潜力,为未来的高性能应用。© 2018电化学学会。[DOI:10.1149/2.0221803jss]
We demonstrated GaN-based resonant-cavity light-emitting diodes (RCLEDs) fabricated on a copper substrate by electroplating and laser lift-off techniques. A TiO2/SiO2 dielectric distributed Bragg reflector (DBR) and an aluminum metal reflector were employed as top and bottom mirrors, respectively. As compared to the conventional LED without a top mirror, improved performances were achieved in RCLED devices due to the resonant cavity effect. We also investigated the effects of the top TiO2/SiO2 dielectric DBR on device characteristics. By tuning the reflectivity of the top dielectric DBR, the optimum RCLED device with the top DBR reflectivity of 55% shows a high output power of 62 mW, an external quantum efficiency of 14.8%, a full width at half maximum (FWHM) of 12 nm for emission spectrum, a 50% viewing angle of 122◦ and a -3 dB modulation bandwidth of 48 MHz. The results show that the RCLED device with the optimum reflectors has considerable potential for future high-performance application. © 2018 The Electrochemical Society. [DOI: 10.1149/2.0221803jss]
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