Morphology and structure of diamond-like carbon film induced by picosecond laser ablation

Morphology and structure of diamond-like carbon film induced by picosecond laser ablation
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皮秒激光烧蚀诱导类金刚石碳膜的形貌和结构

DOI:
10.1007/s00339-022-05980-5
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发表时间:
2022
期刊:
Applied Physics A
影响因子:
--
通讯作者:
M. Yamaguchi
M. Yamaguchi
中科院分区:
--
文献类型:
--
作者:
K. Takabayashi;T. Takahashi;E. Tsuchiya;K. Mimura;Y. Yamamoto;Y. Kobayashi;T. Tomita;M. Yamaguchi

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利用拉曼光谱研究了激光诱导的类金刚石碳(称为四面体非晶碳)的微观结构变化。通过激光辐照,在烧蚀坑中心形成了粗糙的激光诱导周期性表面结构(LIPSSs),在烧蚀坑的上部和下部周边区域形成了精细的LIPSSs。通过对环形山周围的映射测量对拉曼光谱进行分析,表明在没有形态或结构变化的情况下发生缺陷密度的增加。在局部注量较高的辐照区域,sp2发生聚集和结晶。讨论了晶体结构变化与局部注量的关系。
Raman spectroscopy was performed to investigate the laser-induced microscopic structural changes in diamond-like carbon known as tetrahedral amorphous carbon. Coarse laser-induced periodic surface structures (LIPSSs) at the center of the crater and fine LIPSSs at the upper and lower peripheral regions of the ablated crater were formed via laser irradiation. An analysis of the Raman spectra via mapping measurements around the periphery of the crater demonstrated an increase in defect density occurred without morphological or structural changes. In irradiated areas with a higher local fluence, clustering and crystallization ofsp2occurred. The relationship between the crystalline structural changes and the local fluence was discussed.
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