Experimental research on effects of process parameters on servo scanning 3D micro electrical discharge machining
Experimental research on effects of process parameters on servo scanning 3D micro electrical discharge machining
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工艺参数对伺服扫描3D微放电加工影响的实验研究
DOI：
10.3901/cjme.2012.01.114
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发表时间：
2012-01
期刊：
影响因子：
--
通讯作者：
Hu Manhong
中科院分区：
文献类型：
--
作者：
Tong Hao;Li Yong;Hu Manhong
伺服扫描三维微细电火花加工（3DSSMEDM）是在导电材料上加工高深宽比复杂三维微结构的一种新颖而有效的方法。在三维微细电火花加工中，通过伺服保持放电间隙，可以自动补偿工具电极的轴向磨损，而不是传统的依靠经验模型或间歇补偿的方法。然而，工艺参数对三维SSMEDM的影响至今未见报道。在这项研究中，重点放在脉冲宽度，峰值电流，加工极性，轨道类型，轨道重叠，和扫描速度的影响，三维SSMEDM加工效率，加工状态，和表面精度的性能。在掺杂硅上加工了一个900 μ m × 600 μ m的微型矩形腔，进行了一系列实验。实验结果如下。峰值电流对加工效率和表面精度起着主要作用。脉冲宽度对放电状态的稳定性有明显的影响。阴极处理的材料去除率约为阳极处理的3/5。与方向平行路径相比，轮廓平行路径更能抵消工具电极端的侧向磨损。扫描速度应选择适中，以避免电弧和短路。轨迹重叠应略小于工具电极半径。此外，基于优化的工艺参数，加工了一个典型的眼睛形状的三维微结构。研究结果对提高三维微细电解加工的稳定性、精度和效率具有重要意义。
Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM.
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DOI：
10.1016/j.jmatprotec.2004.02.008
发表时间：
2004-06-10
影响因子：
6.3
作者：
Pham, DT;Dimov, SS;Popov, K
通讯作者：
Popov, K
DOI：
10.1115/mnc2007-21262
发表时间：
2007
期刊：
Journal of the Japan Society of Electrical-machining Engineers
影响因子：
--
作者：
Yong Li;H. Tong;Jingdan Cui;Yang Wang
通讯作者：
Yong Li;H. Tong;Jingdan Cui;Yang Wang
DOI：
10.1016/s0007-8506(07)60551-4
发表时间：
2003
期刊：
CIRP Annals
影响因子：
--
作者：
Zuyuan Yu;J. Kozak;K. Rajurkar
通讯作者：
Zuyuan Yu;J. Kozak;K. Rajurkar
影响因子：
6.3
作者：
Lim, HS;Wong, YS;Lee, MKE
通讯作者：
Lee, MKE
DOI：
10.1016/s0007-8506(07)63451-9
发表时间：
2000
期刊：
CIRP Annals
影响因子：
--
作者：
T. Masuzawa
通讯作者：
T. Masuzawa