Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators
Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators
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侧支撑径向模式薄膜硅压电盘谐振器
DOI：
10.1109/tuffc.2019.2893121
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Abdolvand, Reza
中科院分区：
文献类型：
--
作者：
Shahraini, Sarah;Shahmohammadi, Mohsen;Fatemi, Hedy;Abdolvand, Reza
本文利用单晶硅（SCS）的各向异性来实现侧支撑基片上薄膜压电（TPoS）圆盘谐振器。在各向同性材料的情况下，它表明，盘周边的位移是不均匀的径向模式共振在SCS磁盘。具体而言，对于高次谐波，节点形成在边缘上，从而创造了放置悬挂系绳的机会，并且使得侧支撑硅盘谐振器能够在非常高的频带处具有可忽略的锚损耗。为了深入研究材料特性和系绳位置的影响，使用COMSOL中的3-D完全匹配层来模拟锚损失。通过建模，它示出了八次谐波侧支撑SCS盘谐振器可能具有数量级较低的锚损失相比，其纳米晶体金刚石（NCD）盘谐振器对应物的系绳对准硅的[100]晶面。实验结果表明，在TPoS盘中，谐振器制作在8 μm的SOI晶片上，当系绳与[100]面对齐时，空载品质因数从43 MHz的二次谐波模的~450提高到196 MHz的八次谐波模的~11500。对于具有对准到[110]平面的系链的NCD盘谐振器和SCS盘谐振器没有观察到相同的趋势。最后，对在8 μ m厚简并n型掺杂SCS上制作的圆片谐振器的频率温度系数进行了模拟和测量，并利用TFC数据对谐振峰进行了正确的识别。
In this paper, anisotropy of single-crystalline silicon (SCS) is exploited to enable side-supported radial-mode thin-film piezoelectric-on-substrate (TPoS) disk resonators. In contrast to the case for isotropic material, it is demonstrated that the displacement of the disk periphery is not uniform for the radial-mode resonance in SCS disks. Specifically, for high-order harmonics, nodal points are formed on the edges, creating an opportunity for placing suspension tethers and enabling side-supported silicon disk resonators at the very high-frequency band with negligible anchor loss. In order to thoroughly study the effect of material properties and the tether location, anchor loss is simulated using a 3-D perfectly matched layer in COMSOL. Through modeling, it is shown that eighth-harmonic side-supported SCS disk resonators could potentially have orders of magnitude lower anchor loss in comparison to their nanocrystalline diamond (NCD) disk resonator counterparts given the tethers are aligned to the [100] crystalline plane of silicon. It is then experimentally demonstrated that in TPoS disk, resonators fabricated on an 8-μm silicon-on-insulator (SOI) wafer, unloaded quality factor improves from ~450 for the second-harmonic mode at 43 MHz to ~11500 for the eighth-harmonic mode at 196 MHz if tethers are aligned to [100] plane. The same trend is not observed for NCD disk resonators and SCS disk resonators with tethers aligned to [110] plane. Finally, the temperature coefficient of frequency is simulated and measured for the radial-mode disk resonators fabricated on the 8-μm-thick degenerately n-type doped SCS, and the TFC data are utilized to guarantee proper identification of the harmonic radial-mode resonance peaks among others.
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影响因子：
4
作者：
Hsu, Feng-Chia;Hsu, Jin-Chen;Chang, Pin
通讯作者：
Chang, Pin
影响因子：
4.1
作者：
BERENGER, JP
通讯作者：
BERENGER, JP
谐振器的有限元建模
DOI：
--
发表时间：
2015
期刊：
影响因子：
--
作者：
R. Abdolvand;J. Gonzales;G. Ho
通讯作者：
G. Ho
减少微机械拉伸模式谐振器中的锚损耗
DOI：
--
发表时间：
2010
期刊：
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
影响因子：
--
作者：
Vahdettin Taş;S. Olçum;M. Aksoy;A. Atalar
通讯作者：
A. Atalar