Fabrication of photothermally actuated microheater with SU-8/Cu composite
Fabrication of photothermally actuated microheater with SU-8/Cu composite
复制标题
SU-8/Cu复合材料光热驱动微加热器的制作
DOI：
10.1088/1361-6439/ac1996
复制
发表时间：
2021
影响因子：
2.3
通讯作者：
Minami Kazuyuki
中科院分区：
文献类型：
--
作者：
Nakahara Tasuku;Ise Kazuki;Minami Kazuyuki
对光热驱动微加热器的各种应用进行了研究。特别是，利用聚合物和颗粒混合的复合材料开发了用于微型机器人和热响应结构的微加热器。然而，这些结构是通过软光刻工艺制造的，需要多个步骤。在这里，我们提出了一种使用光敏复合材料制造的微加热器，该复合材料是光敏树脂SU-8和Cu微粒的混合物。一步光刻制备的复合材料结构由于倒置荧光显微镜的观察系统引起的光热效应而出现温度升高。在评估复合材料的图案精度时，尽管形成的线和空间图案至少为30µm，但制造的图案涉及5%-25%的尺寸误差。在我们的实验中，含有50 wt%的1µm的Cu颗粒的复合材料的最高温度为55.7℃。制作了微加热器的微图，显示温度上升16℃~ 46℃，温度上升的时间响应约为1 s。因此，所提出的微加热器可用于在10 - 40℃范围内温度变化的应用。
The photothermally actuated microheaters have been studied for various applications. In particular, microheaters using composites mixed with polymer and particles were developed for a microrobot and thermally responsive structures. However, the structures have been fabricated by soft lithography process, which needs multiple steps. Here, we propose a microheater fabricated using a photosensitive composite, which is a mixture of the photosensitive resin SU-8 and Cu microparticles. The composite structures fabricated by one step photolithography exhibited a rise of temperature due to the photothermal effect, which was induced by the observation system of an inverted fluorescent microscope. In evaluating the patterning accuracy of the composite, although the line-and-space pattern formed was a minimum of 30 µm, the fabricated patterns involved a dimensional error of 5%–25%. The composite with 50 wt% Cu particles of 1 µm showed a maximum temperature of 55.7 C in our experiments. The micropatterns of the microheater were fabricated and showed a rise of temperature of 16 C–46 C. In addition, the time response of the rising temperature was approximately 1 s. Thus, the proposed microheater could be useful for applications in which a change of temperature in the range of 10 C–40 C.
登录
查看更多内容
影响因子：
10.8
作者：
Wang E;Desai MS;Lee SW
通讯作者：
Lee SW
改善环氧纳米复合材料的性能，适用于 MEMS/NEMS 领域的特定应用
DOI：
10.1016/j.mee.2007.01.046
发表时间：
2007
期刊：
影响因子：
--
作者：
A. Voigt;M. Heinrich;Cristina Martín;A. Llobera;G. Gruetzner;F. Pérez
通讯作者：
F. Pérez
DOI：
10.1016/j.bbrc.2006.07.138
发表时间：
2006-09-29
影响因子：
3.1
作者：
Tsuda, Yukiko;Kikuchi, Akihiko;Okano, Teruo
通讯作者：
Okano, Teruo
DOI：
10.1007/s00542-002-0242-2
发表时间：
2004-05-01
影响因子：
2.1
作者：
Liu, J;Cai, B;Chen, D
通讯作者：
Chen, D
通过图案化金薄膜上的荧光激发进行温度监测的滑动微管的原位速度控制
影响因子：
2.3
作者：
Tasuku Nakahara;Junya Ikuta;Hirofumi Shintaku;Hidetoshi Kotera;Ryuji Yokokawa
通讯作者：
Ryuji Yokokawa