An ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducers.
An ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducers.
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DOI：
10.1038/s41598-022-19693-5
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发表时间：
2022-09-28
影响因子：
4.6
通讯作者：
Pang, Wei
中科院分区：
文献类型：
--
作者：
Rong, Zhicong;Zhang, Menglun;Ning, Yuan;Pang, Wei
无线功率传输是用于为可植入生物医学设备供电的使能技术之一。由于安全性和占地面积问题，无线功率传输设备的生物相容性和CMOS相容性是非常期望的。针对植入式应用，本文提出了一种基于AlN压电微机械超声换能器（PMUT）的超声感应无线电源。无线供电集成了无线电能传输、电源管理和能量存储功能。PMUT阵列用作无源无线功率接收器，随后是电阻抗匹配网络和电压倍增器，用于高效的功率传输和整流。在低于FDA安全限值的入射超声功率下，无线接收器的输出功率强度达到7.36 μW/mm 2。该无线电源的输出功率达到18.8 μW，经过电源管理后，一个100 μF的电容器可充满3.19 V，足以为许多低功耗的植入式生物医学设备供电，如神经电刺激、生物传感器和体内通信等应用。无线电源在直径为1 cm的PCB中实现。与常用的PZT相比，AlN薄膜具有生物相容性和CMOS兼容性，所提出的解决方案为更安全和超小型化的无线电源铺平了道路，并在未来将所有功能集成在单片芯片上。
Wireless power transfer is one of the enabling technologies for powering implantable biomedical devices. Biocompatibility and CMOS compatibility of wireless power transfer devices are highly desired due to safety and footprint concerns. Toward implantable applications, this paper presents an ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducer (PMUT). The wireless power supply integrates wireless power transfer, power management and energy storage functions. The PMUT array is used as a passive wireless power receiver, followed by electrical impedance matching networks and a voltage multiplier for efficient power transmission and rectification. The output power intensity of the wireless receiver reaches 7.36 μW/mm2 with an incident ultrasound power below the FDA safety limit. The output power of the wireless power supply reaches 18.8 μW and a 100-μF capacitor is fully charged to 3.19 V after power management, which are sufficient to power many low-power implantable biomedical devices such as for neural electrical stimulation, biosensors and intrabody communication applications. The wireless power supply is implemented in a PCB with a diameter of 1 cm. With biocompatibility and CMOS compatibility of AlN thin film compared to commonly used PZT, the proposed solution paves the way for safer and ultraminiaturized wireless power supplies with further development incorporating all the functions on a monolithic chip in the future.
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