Thickness-dependent morphology, microstructure, adsorption and surface free energy of sputtered CeO2 films
Thickness-dependent morphology, microstructure, adsorption and surface free energy of sputtered CeO2 films
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溅射 CeO2 薄膜的厚度相关形貌、微观结构、吸附和表面自由能
DOI：
10.1016/j.ceramint.2020.02.188
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发表时间：
2020-06
影响因子：
5.2
通讯作者：
Xuefeng Zhang
中科院分区：
文献类型：
--
作者：
Xiangyang Tan;Dapeng Zhu;Zhen Shi;Xuefeng Zhang
厚度是决定薄膜表面形貌、微结构和性能的关键因素。本文采用磁控溅射法在硅衬底上沉积了不同厚度的CeO2薄膜。制备的薄膜具有(111)晶面的择优取向，与其他晶向相比，(111)晶面的表面能最小。薄膜厚度影响CeO2薄膜的表面形貌、微结构、表面化学以及润湿性能。随着薄膜厚度的增加，颗粒尺寸变大，均方根(RMS)粗糙度增大。薄膜越厚，氧空位越多，对碳氢化合物的吸附越强，润湿性越弱，水接触角可达101.8°。此外，表面自由能计算表明，水与薄膜表面的相互作用主要是静电作用，随着薄膜厚度的增加，表面自由能减小。这种薄膜具有不同的厚度和可控的润湿性，可以在各种实际应用中得到应用。
Thickness plays a key role in determining the surface morphology, microstructure and properties of films. Herein, CeO2films with different thickness were deposited onto silicon substrates by magnetron sputtering. Prepared films exhibited preferred crystal orientation of (111) plane, which had the smallest surface energy compared to other crystal orientations. Film thickness affected the surface morphology, microstructure, surface chemistry, as well as wetting properties of CeO2films. With increasing film thickness, the grain size became larger and the root-mean-square (RMS) roughness increased. More oxygen vacancies were detected for the thicker film, which enhanced the hydrocarbon adsorption and reduced the wetting, the water contact angle could reach 101.8°. In addition, surface free energy calculations showed that the interaction between water and film surface was mainly electrostatic and surface free energy decreased when the film became thicker. Such films with varying thickness and controllable wettability could find various practical applications.
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