Determination of thin metal film’s thickness and optical constants based on SPR phase detection by simulated annealing particle swarm optimization

Determination of thin metal film’s thickness and optical constants based on SPR phase detection by simulated annealing particle swarm optimization
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通过模拟退火粒子群优化基于 SPR 相位检测确定金属薄膜的厚度和光学常数

DOI:
10.1016/j.optcom.2018.08.051
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发表时间:
2019-01
影响因子:
2.4
通讯作者:
Qinggang Liu
Qinggang Liu
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Chong Yue;Zirui Qin;Yaopu Lang;Qinggang Liu

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Simulated annealing particle swarm optimization (SAPSO) method for inverse model of optical properties of multilayer thin films based on surface plasmon resonance (SPR) experimental results is introduced in this paper. The purpose is to extract unknown parameters from the phase difference between P- and S- polarizations of the reflected light occurred at the metal/dielectric interface. The results of both the metallic and bimetallic layer derived from our method are in better agreement with the experiment data than particle swarm optimization (PSO) method. Therefore, the approach reveals the possibility of retrieving the thickness and optical constants from the measurement results of the phase difference for multilayers, and makes it be a much better option to be employed for further film’s parameter analysis applications.
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