Charge injection characteristics of sputtered ruthenium oxide electrodes for neural stimulation and recording.
Charge injection characteristics of sputtered ruthenium oxide electrodes for neural stimulation and recording.
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DOI：
10.1002/jbm.b.34906
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发表时间：
2022-01
期刊：
影响因子：
--
通讯作者：
Cogan SF
中科院分区：
文献类型：
--
作者：
Chakraborty B;Joshi-Imre A;Cogan SF
我们研究了溅射氧化钌（RuOx）膜作为神经刺激和记录电极的电极涂层的电荷注入特性和电化学阻抗。RuOx薄膜的沉积反应直流磁控溅射，使用水蒸气和氧气的组合作为反应等离子体成分。发现平面RuOx电极的阴极电荷存储容量为54.6 ± 9.5 mC/cm 2（平均值± SD，n = 12），并且发现在0.2 ms阴极电流脉冲中的电荷注入容量为7.1 ± 0.3 mC/cm 2（平均值± SD，n = 15| AgCl，在室温下在磷酸盐缓冲盐水中制备约250 nm厚的膜。在一般情况下，RuOx膜表现出高的电荷注入容量，有或没有一个积极的脉冲间偏压，溅射氧化铱（SIROF）涂层。电荷注入容量随膜厚从120 nm到630 nm单调增加，在0.6 V偏压下相对于Ag达到11.30 ± 0.34 mC/cm 2（平均值± SD，n = 5）|AgCl，630 nm膜厚。此外，RuOx薄膜在408 μC/cm 2（8 nC/相，200 μs脉冲宽度）的电荷密度下，在15亿次恒流脉冲循环中表现出最小的电化学特性变化。低阻抗、高电荷注入能力和长期脉冲稳定性的发现表明RuOx适合作为用于神经刺激和记录的电极材料的相对便宜和有利的选择。
We have studied the charge-injection characteristics and electrochemical impedance of sputtered ruthenium oxide (RuOx) films as electrode coatings for neural stimulation and recording electrodes. RuOx films were deposited by reactive DC magnetron sputtering, using a combination of water vapor and oxygen gas as reactive plasma constituents. The cathodal charge storage capacity of planar RuOx electrodes was found to be 54.6 ± 9.5 mC/cm2 (mean ± SD, n = 12), and the charge-injection capacity in a 0.2-ms cathodal current pulse was found to be 7.1 ± 0.3 mC/cm2 (mean ± SD, n = 15) at 0.6 V positive bias versus Ag|AgCl, in phosphate buffer saline at room temperature for ~250 nm thick films. In general, the RuOx films exhibited high charge-injection capacities, with or without a positive interpulse bias, comparable to sputtered iridium oxide (SIROF) coatings. The charge-injection capacity increased monotonically with film thickness from 120 to 630 nm, and reached 11.30 ± 0.34 mC/cm2 (mean ± SD, n = 5) at 0.6 V bias versus Ag|AgCl at 630 nm film thickness. In addition, RuOx films showed minimal changes in electrochemical characteristics over 1.5 billion cycles of constant current pulsing at a charge density of 408 μC/cm2 (8 nC/phase, 200 μs pulse width). The findings of low-impedance, high charge-injection capacity, and long-term pulsing stability suggest the suitability of RuOx as a comparatively inexpensive and favorable choice of electrode material for neural stimulation and recording.
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DOI：
10.1002/jbm.b.31223
发表时间：
2009-05
期刊：
Journal of biomedical materials research. Part B, Applied biomaterials
影响因子：
--
作者：
Cogan SF;Ehrlich J;Plante TD;Smirnov A;Shire DB;Gingerich M;Rizzo JF
通讯作者：
Rizzo JF
影响因子：
3
作者：
Negi S;Bhandari R;Rieth L;Van Wagenen R;Solzbacher F
通讯作者：
Solzbacher F
DOI：
10.1002/jbm.b.34728
发表时间：
2021-05
期刊：
Journal of biomedical materials research. Part B, Applied biomaterials
影响因子：
--
作者：
Chakraborty B;Joshi-Imre A;Maeng J;Cogan SF
通讯作者：
Cogan SF
影响因子：
1.8
作者：
Humayun, MS;Weiland, JD;de Juan, E
通讯作者：
de Juan, E
影响因子：
3.3
作者：
Dmowski, W;Egami, T;Rolison, DR
通讯作者：
Rolison, DR