Preparation of Thick BaZrO3 Epitaxial Film for Coated Conductors by Polymer-Assisted Chemical Solution Deposition Method

Preparation of Thick BaZrO3 Epitaxial Film for Coated Conductors by Polymer-Assisted Chemical Solution Deposition Method
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聚合物辅助化学溶液沉积法制备涂层导体厚 BaZrO3 外延膜

DOI:
10.1007/s10948-014-2529-9
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发表时间:
2014-03
影响因子:
1.8
通讯作者:
Zhang, H.
Zhang, H.
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Xia, Y. D.;Cheng, C. H.;Zhang, Y.;Zhang, H.

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采用聚合物辅助化学溶液沉积法在单晶衬底上制备了BaZrO_3(BZO)外延薄膜,并对其进行了X射线衍射(XRD)、扫描电镜(SEM)和原子力显微镜(AFM)分析。结果表明,外延膜的表面形貌和c轴织构程度随加工温度和气氛的变化而变化,在氩气中的最佳加工温度为900 °C。薄膜被发现具有良好的相纯度,高度的面内和面外织构,良好的密度与针孔和微裂纹的性质,和足够的厚度为250 nm。高度外延的700 nm厚的YBa 2Cu 3 O 7 −x(YBCO)薄膜在77 K下的自场临界电流密度(Jc)达到1.2 MA/cm 2。这些结果表明,BZO外延膜与目前的技术具有潜力作为单一的缓冲层的YBCO涂层导体。
BaZrO3 (BZO) epitaxial films have been deposited on single-crystal substrate by polymer-assisted chemical solution deposition method and have been studied with X-ray diffraction (XRD), SEM, and AFM analyses. It is found that the surface morphology and degree of c-axis texturing of the epi-films vary with processing temperature and atmosphere, with the optimized processing temperature of 900 °C in argon. The films are found with good phase purity, high-degree in-plane and out-of-plane texturing, good density with pin hole- and microcrack-free nature, and a sufficient thickness of >250 nm. Highly epitaxial 700-nm-thick YBa2Cu3O7−x (YBCO) thin film exhibits the self-field critical current density (Jc) that reached 1.2 MA/cm2 at 77 K. These results show that the BZO epi-films made with the current technique possess potentials as a single buffer layer for YBCO-coated conductors.
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