Two-level systems and growth-induced metastability in hydrogenated amorphous silicon

Two-level systems and growth-induced metastability in hydrogenated amorphous silicon
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氢化非晶硅中的两能级系统和生长诱导的亚稳态

DOI:
10.1088/2053-1591/abb498
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发表时间:
2020
影响因子:
2.3
通讯作者:
Hellman, F.
Hellman, F.
中科院分区:
材料科学4区
文献类型:
--
作者:
Molina-Ruiz, M.;Jacks, H. C.;Queen, D. R.;Wang, Q.;Crandall, R. S.;Hellman, F.

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由热线化学气相沉积制备的氢化非晶硅在2~300K温度范围内的比热测量表明,在低温下有很大的过剩比热,明显大于由测量的声速计算的德拜比热。所制备的薄膜具有与非晶态网络中的亚稳态氢有关的肖特基反常,以及通常与非晶态固体中的隧穿二能级系统有关的大的线性和超额立方项。在200℃的温度下进行热处理,会不可逆转地降低热容,消除肖特基反常现象,并使线性热容降低。除了声速外,所有效应对生长温度和H含量的依赖关系都不是单调的,这表明隧道二能级系统和肖特基反常与原子氢有关,需要形成低密度区,而声速与硅网络有关,并随着生长温度的升高而增加。
Specific heat measurements from 2 to 300 K of hydrogenated amorphous silicon prepared by hot-wire chemical vapor deposition show a large excess specific heat at low temperature, significantly larger than the Debye specific heat calculated from the measured sound velocity. The as-prepared films have a Schottky anomaly that is associated with metastable hydrogen in the amorphous network, as well as large linear and excess cubic term commonly associated with tunneling two-level systems in amorphous solids. Annealing at 200 C, a temperature that enables hydrogen mobility but not evaporation, irreversibly reduces the heat capacity, eliminating the Schottky anomaly and leaving a reduced linear heat capacity. A non-monotonic dependence on growth temperature and H content is observed in all effects, except for sound velocity, which suggests that the tunneling two-level systems and the Schottky anomaly are associated with atomic hydrogen and require low density regions to form, while sound velocity is associated with the silicon network and increases with increasing growth temperature.
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