Study on the electron mobility related with ohmic contact width in AlGaN/GaN HEMTs

Study on the electron mobility related with ohmic contact width in AlGaN/GaN HEMTs
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AlGaN/GaN HEMT 中电子迁移率与欧姆接触宽度相关的研究

DOI:
10.1142/s0217984921500081
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发表时间:
2020-09
影响因子:
1.9
通讯作者:
Yang Liu
Yang Liu
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Ming Yang;Qizheng Ji;Xinguang Su;Weihong Zhang;Yuanyuan Wang;Lei Wang;Xiaofeng Hu;Qingyun Yuan;Peiyuan Feng;Yang Liu

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对不同欧姆接触宽度的AlGaN/GaN高电子迁移率晶体管(HEMT)进行了栅沟电子迁移率的实验研究。流动性曲线显示了非常不同的值和趋势。利用AlGaN/GaN HEMT中的散射理论研究了这一现象。不同的迁移率曲线的原因被认为是由于不同的极化电荷分布在AlGaN/GaN界面。具有较小欧姆接触宽度的AlGaN/GaN HEMT对应于欧姆接触附近的正附加极化电荷。具有较大欧姆接触宽度的AlGaN/GaN HEMT对应于欧姆接触附近的负附加极化电荷。改变欧姆接触宽度将是有效优化AlGaN/GaN HEMT器件特性的一个新方向。
For the fabricated AlGaN/GaN high electron mobility transistors (HEMTs) with different Ohmic contact widths, the gate-channel electron mobility is obtained experimentally. Mobility curves show very different values and trends. This phenomenon is investigated with the scattering theory in AlGaN/GaN HEMTs. The reason for the different mobility curves is found to be attributed to the different polarization charge distributions at the AlGaN/GaN interface. The AlGaN/GaN HEMT with a smaller Ohmic contact width corresponds to positive additional polarization charge near the Ohmic contact. The AlGaN/GaN HEMT with a larger Ohmic contact width corresponds to negative additional polarization charge near the Ohmic contact. Changing the Ohmic contact width will be a new dimension to optimize the characteristics of AlGaN/GaN HEMTs effectively.
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