Self-Assembled Monolayers of Cyclic Aliphatic Thiols and Their Reaction toward Electron Irradiation

Self-Assembled Monolayers of Cyclic Aliphatic Thiols and Their Reaction toward Electron Irradiation
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环状脂肪族硫醇的自组装单分子层及其电子辐照反应

DOI:
10.1021/jp210768y
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发表时间:
2012
影响因子:
3.7
通讯作者:
M. Zharnikov
M. Zharnikov
中科院分区:
化学3区
文献类型:
--
作者:
P. A. Waske;W. Eck;M. Zharnikov

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我们研究了一个古老的教条,即芳香族自组装单分子膜(SAMs)的交联和稳定的电子辐射,而脂肪族自组装单分子膜在相同的基板上降解在相同的条件下。为此,我们在Au(111)表面制备了新型脂环族分子(4-环己基环己硫醇,CCHT)的自组装膜,并研究了它们对电子辐照的响应。CCHT单分子膜表现出低程度的分子碎片整理和头部基团-基底界面的损伤。这是解释的主导地位的辐射诱导的交联碎片整理和解吸事件,这是另外支持的负抗蚀剂性能的CCHT膜的框架中的电子束光刻。这种行为明显不同于线性脂肪族分子的自组装膜,后者在极低的辐照剂量下会受到严重损伤,并表现出正性抗蚀剂性能。然而,它类似于芳香族单分子膜的行为,这强调了环状结构在单分子膜中交联和碎片整理平衡中的作用。
We investigated an old dogma, namely, that aromatic self-assembled monolayers (SAMs) are cross-linked and stabilized by irradiation with electrons, whereas aliphatic SAMs on the same substrate are degraded under the same conditions. To this end, we prepared SAMs of novel cycloaliphatic molecules (4-cyclohexylcyclohexanethiols, CCHT) on Au(111) surfaces and studied their response to electron irradiation. The CCHT monolayers demonstrated a comparably low extent of molecular defragmentation and damage of the headgroup–substrate interface. This was explained by the dominance of irradiation-induced cross-linking over defragmentation and desorption events, which was additionally supported by the negative resist performance of the CCHT films in the framework of electron beam lithography. This behavior is distinctly different from SAMs of linear aliphatic molecules, which become severely damaged at comparably low irradiation doses and exhibit the positive resist performance. It is, however, similar to the behavior of aromatic monolayers, which underlines the role of the cyclic structure in the balance of cross-linking and defragmentation in monomolecular films.
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