The evolution of hardness in Cu-W alloy thin films

The evolution of hardness in Cu-W alloy thin films
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Cu-W合金薄膜的硬度演变

DOI:
10.1016/j.msea.2018.05.035
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发表时间:
2018-06
影响因子:
6.4
通讯作者:
Zhou Lingping
Zhou Lingping
中科院分区:
材料科学1区
文献类型:
--
作者:
Xie Tianle;Zhu Jiajun;Fu Licai;Zhang Ruiling;Li Na;Yang Mengzhao;Wang Jiale;Qin Wen;Yang Wulin;Li Deyi;Zhou Lingping

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A series of Cu-W films with the W content higher than 17.2 at% were prepared by magnetron sputtering focused co-deposition technology. The micro-structures and nanoidentation hardness of the films were investigated. Except for the fcc, amorphous and bcc phases, a novel multilayered structure has been observed at the range of about 17.2–90 at% W. Within the multilayered structure, the high-density interfaces can inhibit the motion of dislocations, which resulted in the hardness at least 2 GPa higher than that of the mixing rule. Depending on different microstructures, the hardness curve of the Cu-W films can be divided into three regions instead of the linear increase with the W content. From 17.2–40 at% W, the hardness increased slowly due to lots of amorphous phase. Within 40–65 at% W, the hardness increased linearly, which was caused by the gradually obvious multilayered structure and decreasing amorphous content. Above 65 at% W, single-phase body-centered cubic (bcc) films were observed. In this region, the upward trend of hardness slowed down due to the porous columnar structure and gradually disappeared multilayered structure.
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