Selective Doping of Block Copolymer Nanodomains by Sputter Deposition of Iron

Selective Doping of Block Copolymer Nanodomains by Sputter Deposition of Iron
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通过铁的溅射沉积选择性掺杂嵌段共聚物纳米域

DOI:
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发表时间:
2011
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影响因子:
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通讯作者:
P. Müller‐Buschbaum
P. Müller‐Buschbaum
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文献类型:
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作者:
M. A. Kashem;G. Kaune;A. Diethert;Weinan Wang;K. Schlage;S. Couet;R. Röhlsberger;S. Roth;P. Müller‐Buschbaum

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我们研究了通过在薄的二嵌段共聚物薄膜中选择性掺杂微相分离的纳米域来形成有序的金属纳米簇阵列。利用微束掠入射小角度 X 射线散射 (μGISAXS) 和异位原子力显微镜 (AFM) 来原位探测掺杂过程中纳米结构的形成。在聚苯乙烯-嵌段-聚(甲基丙烯酸甲酯) P(S-b-MMA) 共聚物的薄膜模板上溅射沉积铁期间,具有直立的PMMA圆柱域,铁原子由于优先化学亲和力而选择性地掺杂PMMA域。 AFM 证实了 μGISAXS 结果,即铁原子在溅射沉积铁量较少时优先润湿 PMMA 域。沉积铁的标称厚度达到 2.0 nm 的阈值时,原子仅润湿 PMMA 域并形成金属纳米团簇的有序阵列。超过该阈值厚度,铁纳米结构横向生长并最终覆盖整个模板表面。
We investigate the formation of an ordered array of metal nanoclusters via selective doping of microphase-separated nanodomains in thin diblock copolymer films. Nanostructure formation during this doping process is probed in situ with microbeam grazing incidence small-angle X-ray scattering (μGISAXS) and ex-situ with atomic force microscopy (AFM). During sputter deposition of iron on the thin film template of polystyrene-block-poly(methyl methacrylate) P(S-b-MMA) copolymer, having upright cylindrical domains of PMMA, iron atoms selectively dope the PMMA domains due to the preferential chemical affinity. AFM confirms the μGISAXS results that the iron atoms preferentially wet the PMMA domains at low amount of sputter deposited iron. Up to a threshold of a nominal thickness of 2.0 nm deposited iron, the atoms wet only the PMMA domains and create the ordered array of metal nanoclusters. Above this threshold thickness the iron nanostructures grow laterally and finally cover the complete template surface.
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