Resonance in a sub-wavelength metal-dielectric free-standing grating utilized for gas sensors

Resonance in a sub-wavelength metal-dielectric free-standing grating utilized for gas sensors
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用于气体传感器的亚波长金属电介质独立式光栅的谐振

DOI:
10.1016/j.optcom.2012.07.044
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发表时间:
2012-11
影响因子:
2.4
通讯作者:
Li, Dongmei
Li, Dongmei
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Hong, Meihua;Shi, Lina;Li, Hailiang;Du, Yuchan;Wang, Ziqiang;Weng, Yongchao;Li, Dongmei

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本文描述了一种用于气体传感器的亚波长金属-介质自支撑光栅。利用光子晶体(PHC)平板结构中的导模共振对该结构进行了分析,并预测了该传感器的主要性能。用时域有限差分法(FDTD)数值模拟验证了理论预测,并对器件性能进行了优化。结果表明,在TM偏振垂直入射时,透射谱上有一个窄而剧烈的吸收峰,吸收峰的位置与背景折射率呈线性关系,可作为高分辨率的气体分析折射率变化传感器。在可见光范围内的光谱灵敏度达到720.92 nm/RIU(折射率单位),透射谷的品质因数达到351.67。此外,该传感器的光谱灵敏度和谐振波长都近似等于光栅周期,金(Au)层和氮化硅(SiNx)层的厚度对传感器的性能影响不大。
This paper describes a sub-wavelength metal-dielectric free-standing grating for the purpose of a gas sensor. Guided-mode resonance in photonic crystal (PhC) slab structures is used to analyze this grating structure and predict the main properties of this sensor. Finite-difference time-domain (FDTD) numerical simulations are used to confirm the theoretical prediction and optimize the device performance. It is shown that there is a narrow and dramatic absorption dip on the transmission spectrum at a TM polarized normal incidence, and the dip position depends linearly on the background refractive index, which can be used as high-resolution sensors of refractive index changing in gaseous analytes. Spectral sensitivity as high as 720.92nm/RIU (Refractive Index Unit) is achieved in the visible light region and the quality factor of the transmission valley reaches 351.67. Furthermore, the spectral sensitivity and the resonant wavelength of this sensor are both approximately equal to the grating period, and the thicknesses of gold (Au) layer and silicon nitride (SiNx) layer have little effect on the sensor performance.
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