Effects of annealing temperature on structure and opt-electric properties of ion-conducting LLTO thin films prepared by RF magnetron sputtering

Effects of annealing temperature on structure and opt-electric properties of ion-conducting LLTO thin films prepared by RF magnetron sputtering
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退火温度对射频磁控溅射离子导电LLTO薄膜结构和光电性能的影响

DOI:
10.1016/j.jallcom.2010.10.086
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发表时间:
2011-02
影响因子:
6.2
通讯作者:
Zhao, Xiujian
Zhao, Xiujian
中科院分区:
材料科学2区
文献类型:
--
作者:
Xiong, Yuli;Tao, Haizheng;Zhao, Jiang;Cheng, Hao;Zhao, Xiujian

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Highly transparent and ion-conducting lithium lanthanum titanate (LLTO) thin films were deposited on ITO/glass substrates by RF magnetron sputtering. The results of X-ray diffraction indicate that the as-prepared LLTO thin films and the annealed ones at temperatures up to 300°C are amorphous; however, crystal phases, including La0.56Li0.33TiO3and other unexpected ones, appear on the annealed films at 400°C. SEM and AFM results show that the prepared films turn to be denser, smoother and more uniform up to 300°C while the deteriorative results come out following the further enhancement of annealing temperature. Further characterization of opt-electric properties of the prepared films reveals that the annealed ones at 300°C own the best optical transmittance of 85% and the highest room temperature ionic conductivity of 5.25×10−5Scm−1, which are suitable for the application as an electrolyte of all-solid-state electrochromic devices.
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