Fabrication and characterization of shape anisotropy AlN/FeCoSiB magnetoelectric composite films
Fabrication and characterization of shape anisotropy AlN/FeCoSiB magnetoelectric composite films
复制标题
形状各向异性AlN/FeCoSiB磁电复合薄膜的制备与表征
DOI：
10.1016/j.ceramint.2013.09.090
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发表时间：
2014-03
影响因子：
5.2
通讯作者：
Bei Tong
中科院分区：
文献类型：
--
作者：
Jun Ouyang;Gengqi Lin;Fang Jin;Bei Tong
采用溅射沉积硬掩模法制备了由压电AlN薄膜和磁致伸缩FeCoSiB条形薄膜组成的形状各向异性磁电复合薄膜。结果表明，ME各向异性因子K与FeCoSiB条数密切相关。当条带数不超过8条时，ME各向异性因子K随条带数的增加而缓慢增加。此外，当数目大于8时，ME各向异性因子K急剧增加。当FeCoSiB条数增加到10条时，最大ME各向异性因子K达到135，接近理论值175。但经计算，若采用高精度光刻技术制备出宽度为1 μm的FeCoSiB条带，其ME各向异性因子K可达11,357。在这种情况下，噪声信号将减少到5 nT。本工作制备的AlN/FeCoSiB微电子复合薄膜具有良好的微电子各向异性，在磁场探测方面具有巨大的应用潜力。
The shape anisotropy magnetoelectric (ME) composite films composed of piezoelectric AlN film and magnetostrictive FeCoSiB strips film were fabricated successfully by means of hard-mask during sputter deposition. The results demonstrated that the ME anisotropy factorKwas strongly dependent on the number of FeCoSiB strips. If the number of strips is not more than eight, the ME anisotropy factorKincreases slowly with increasing the strips' number. In addition, ME anisotropy factorKincreases sharply when the number is more than eight. Furthermore, as the number of FeCoSiB strips increases to ten, the maximum ME anisotropy factorKreaches up to a value of 135, close to the theoretical value 175. However, by calculation, the ME anisotropy factorKwill reach up to 11,357 if the FeCoSiB strips are prepared to possess the value of 1 μm in width by high precision photo-etching technology. In that case, the noise signal will be reduced to 5 nT. The shape anisotropy AlN/FeCoSiB ME composite films prepared in this work show great potential application in magnetic field detection in view of good ME anisotropy property.
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