Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies.
Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies.
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DOI：
10.1039/c2nr30197k
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发表时间：
2012-08-07
期刊：
影响因子：
6.7
通讯作者：
Kotov NA
中科院分区：
文献类型：
--
作者：
Bai Y;Ho S;Kotov NA
纳米复合材料在微机电系统、柔性电子和生物医学设备中的应用可能会展示新的性能标准，并解决由电学、光学和机械性能的独特组合所带来的许多困难的技术问题。这项研究探索了融合两种高度通用的技术来制造微米级纳米复合材料图案的可能性：直写无掩模紫外图案化和逐层组装（LBL）。它们一起可用于生产各种具有复杂图案的纳米结构涂层。用壳聚糖（CH）组装的单壁碳纳米管（SWNT）和金纳米颗粒LBL纳米复合材料被制成原型图案，例如用于柔性天线和神经假体设备的同心螺旋和总线和刺激垫（BLASP）。该技术的空间分辨率采用至少 1μm 的标准线网格。金纳米颗粒薄膜在直写图案方面表现出比 SWNT 复合材料更好的精度和更高的分辨率，这可能是由于复合材料的颗粒性质而不是纤维性质。纳米管和纳米粒子复合材料在20°C时图案化复合材料的电导率分别为6.45×10−5 Ω·m和3.80×10−6 Ω·m；在这两种情况下，它都超过了类似复合材料的电气参数。讨论了纳米复合材料 MEMS 器件在植入式生物医学、传感和光学器件等不同领域的基础和技术前景。
Application of nanocomposites in MEMS, flexible electronics, and biomedical devices is likely to demonstrate new performance standards and resolve a number of difficult technical problems enabled by the unique combinations of electrical, optical, and mechanical properties. This study explores the possibility of making microscale nanocomposite patterns using the fusion of two highly versatile techniques: direct-write maskless UV patterning and layer-by-layer assembly (LBL). Together they can be applied to production of a wide variety of nanostructured coatings with complex patterns. Single-walled carbon nanotube (SWNT) and gold nanoparticle LBL nanocomposites assembled with chitosan (CH) were made into prototypical patterns such as concentric helices and bus-line-and-stimulation pads (BLASP) used in flexible antennas and neuroprosthetic devices. The spatial resolution of the technique was established with the standard line grids to be at least 1μm. Gold nanoparticle films revealed better accuracy and higher resolution in direct-write patterning than SWNT composites possibly due to the granular rather than fibrous nature of the composites. The conductivity of the patterned composites was 6.45×10−5 Ω·m and 3.80×10−6 Ω·m at 20°C for nanotube and nanoparticle composites, respectively; in both cases it exceeds electrical parameters of similar composites. Fundamental and technological prospects of nanocomposite MEMS devices in different areas including implantable biomedical, sensing, and optical devices are discussed.
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