Humidity sensor based on Ga2O3 nanorods doped with Na+ and K+ from GaN powder

Humidity sensor based on Ga2O3 nanorods doped with Na+ and K+ from GaN powder
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基于 GaN 粉末中掺杂 Na 和 K 的 Ga2O3 纳米棒的湿度传感器

DOI:
10.1016/j.ceramint.2015.07.211
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发表时间:
2015-12
影响因子:
5.2
通讯作者:
Nan Jiang
Nan Jiang
中科院分区:
材料科学1区
文献类型:
--
作者:
Pengpeng Wang;Xuejun Zheng;Yong Zhang;Nan Jiang

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以商用氮化镓(GaN)粉末为原料,采用简单的热退火法一步合成了氧化镓(Ga 2 O3)纳米棒,并利用X射线衍射(XRD)、场发射扫描电镜(FE-SEM)、透射电镜(TEM)和X射线能谱(EDS)对产物进行了表征。采用旋涂法在涂有Ag-Pd叉指电极的Al 2 O3陶瓷基片上制备了厚膜湿敏元件,并对其湿敏特性进行了研究。所制备的Ga 2 O3纳米棒的直径为40-100 nm,长度为1-6 μm,并成功地掺杂了Na+和K+。当相对湿度(RH)在11%~ 95%范围内变化时,Ga 2 O3纳米棒传感器的阻抗随湿度的变化呈现出良好的线性响应,在4个数量级左右。响应时间和恢复时间分别为6 s和21 s,在100 Hz时最大滞后仅为3%RH。Ga 2 O3纳米棒和离子掺杂的协同效应可能是其良好的感湿性能的原因。
Gallium oxide (Ga2O3) nanorods were prepared from commercial gallium nitride (GaN) powder via the simple thermal annealing method by one step, and they were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), transmission electron microscope (TEM) and energy dispersive X-ray spectroscopy (EDS). The thick film humidity sensors were prepared by spin-coating the sensing materials on Al2O3ceramic substrates coated with Ag–Pd interdigitated electrodes and the humidity sensing properties were studied in detail. The as-prepared Ga2O3nanorods are of diameters 40–100 nm and lengths 1–6 μm, and they are doped with Na+and K+, successfully. The impedance variation of Ga2O3nanorods sensor with the humility exhibits good linearity response about four orders of magnitude, when the relative humility (RH) is changed from 11% to 95% at 100 Hz. Response and recovery times are about 6 s and 21 s and the maximum hysteresis is only 3% RH at 100 Hz. The good humility sensing properties may be attributed to the synergistic effect of Ga2O3nanorods and the ions doping.
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