Kinetics study on non-isothermal crystallization of Ni1.5MnSn0.5Co alloy thin films

Kinetics study on non-isothermal crystallization of Ni1.5MnSn0.5Co alloy thin films
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Ni1.5MnSn0.5Co合金薄膜非等温结晶动力学研究

DOI:
10.1080/10584587.2018.1454780
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发表时间:
2018-05
影响因子:
0.7
通讯作者:
Zhao Wenbin
Zhao Wenbin
中科院分区:
工程技术4区
文献类型:
--
作者:
Wang Zhenhua;Guo Erjun;Tan Changlong;Tian Xiaohua;Zhu Jiachen;Zhao Wenbin

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用连续加热差示扫描量热法(DSC)研究了Ni1.5MnSn0.5Co自支撑合金薄膜的晶化动力学。结果表明,所有的DSC曲线都有一个单一的放热峰,并有一条长的高温尾巴。根据活化能和动力学模型对DSC曲线进行了分析。我们发现,用基辛格方程和小泽方程方法得到的薄膜的晶化激活能都能给出一致的结果,晶化激活能分别为221.2和220.9 kJ/m o l。此外,晶化体积分数对薄膜的局域激活能有显著影响,晶化过程中薄膜的形核和生长规律发生了变化。我们的工作将丰富Ni-Mn-Sn-Co薄膜在微电子机械系统(MEMS)中应用的晶化动力学机理。
ABSTRACT The crystallization kinetics of the Ni1.5MnSn0.5Co free-standing alloy thin films is investigated by continuous heating differential scanning calorimetry (DSC). The results show that all the DSC traces have a single exothermic peak, with a long high temperature tail. The DSC curves have been analyzed in terms of activation energy and kinetic model. We find that the activation energy of film obtained by both the Kissinger and Ozawa equation methods can give consistent results, the activation energy for crystallization is determined as 221.2 and 220.9 KJ/ mol, respectively. Moreover, the volume fraction crystallized has significantly influence on the local activation energy, and the regular of the nucleation and growth of films has been changed at crystallization process. Our work would enrich the mechanism of the crystallization kinetics for annealing applications of Ni-Mn-Sn-Co thin films in microelectro mechanical systems (MEMS).
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