PERIODIC TRANSMISSION OF CIRCULAR BINARY FRESNEL ZONE PLATES WITH ETCHING DEPTH AND SUBSTRATE

PERIODIC TRANSMISSION OF CIRCULAR BINARY FRESNEL ZONE PLATES WITH ETCHING DEPTH AND SUBSTRATE
复制标题

具有蚀刻深度和衬底的圆形二元菲涅耳波带板的周期性传输

DOI:
10.2528/pierl13031802
复制
发表时间:
2013-05
影响因子:
0.9
通讯作者:
Yoichi Okuno
Yoichi Okuno
中科院分区:
--
文献类型:
--
作者:
Yaoju Zhang;Shilei Li;Yan Zhu;Youyi Zhuang;Taikei Suyama;Chongwei Zheng;Yoichi Okuno

文献摘要

参考文献

相似文献

基于散射理论和绿色函数方法,给出了计算分层结构衬底深腐蚀光栅衍射的动力学理论。该方法的关键是将图案化的光栅结构看作是对未图案化的分层结构的扰动,而不是对真空的扰动。利用一级玻恩近似,在菲涅耳衍射区,得到了一个简单的解析表达式,可用于计算深腐蚀圆二元菲涅耳波带片(MDECBFZPs)的散射强度。数值计算结果表明,MDCBFZP的聚焦强度随刻蚀深度和衬底膜厚度呈周期性变化。我们的结果是在良好的协议与FDTD模拟。
Based on the scattering theory and the Green function method, a dynamical theory is given for calculating the difiraction of deeply-etched gratings with a stratifled structure substrate. The key of our method is that the patterned grating structure is considered as a perturbation to the unpatterned stratifled structure rather than to vacuum. Using the flrst-order Born approximation and in the Fresnel difiraction region, we obtain a simple analytical expression, which can be used to calculating the scattering intensity of deeply-etched circular binary Fresnel zone plates with a stratifled substrate (MDECBFZPs). The numerical results show that the focusing intensity at the foci of the MDCBFZP changes periodically with the etching depth and the thickness of the substrate fllm. Our results are in good agreement with FDTD simulations.
DOI: 10.1007/978-3-540-46887-5_12
发表时间: 1992
期刊: --
影响因子: --
作者:
G. Schmahl;B. Niemann;D. Rudolph;M. Diehl;J. Thieme;W. Neff;R. Holz;R. Lebert;F. Richter;G. Herziger
通讯作者: G. Schmahl;B. Niemann;D. Rudolph;M. Diehl;J. Thieme;W. Neff;R. Holz;R. Lebert;F. Richter;G. Herziger
与波长无关的深蚀刻熔融石英光栅的统一设计
DOI: 10.1016/j.optcom.2010.06.041
发表时间: 2010-11
影响因子: 2.4
作者:
Feng, Jijun;Lu, Peng;Cao, Hongchao;Zhou, Changhe
通讯作者: Zhou, Changhe
DOI: 10.1364/ao.47.004004
发表时间: 2008-08
期刊: Applied optics
影响因子: 1.9
作者:
Bo Wang;Changhe Zhou;Jijun Feng;H. Ru;Jiangjun Zheng
通讯作者: Bo Wang;Changhe Zhou;Jijun Feng;H. Ru;Jiangjun Zheng
DOI: 10.1364/josaa.21.000561
发表时间: 2004-04-01
影响因子: 1.9
作者:
Cao, Q;Jahns, J
通讯作者: Jahns, J
DOI: 10.1364/josa.51.000405
发表时间: 1961-01-01
影响因子: --
作者:
BAEZ, AV
通讯作者: BAEZ, AV