Workshop: Engineering Research Needs for Electronic Materials Processing; to be held in Newark, Delaware June 24-25, 1985

研讨会：电子材料加工的工程研究需求；

• 批准号: 8505951
• 负责人: Scott Jackson
• 金额: $ 3.01万
• 依托单位: University of Delaware
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1985
• 资助国家: 美国
• 起止时间: 1985-03-15 至 1986-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8505951&HistoricalAwards=false
• 关键词: Workshop; Engineering; Research; Needs; Electronic

Support will be provided to the workshop on 'Engineering Research Needs for Electronic Materials Processing.' Its objective is to identify the long-range engineering research needs and opportunities in electronic materials processing. The workshop will create an awareness in the academic research community as to where research can be applied in new and emerging technologies and to assist NSF management in the possible focus of future planning and assessment efforts in this area of fundamental research. Invited participants will evaluate the present understanding and capabilities of: thin-film formation, including simple evaporation and molecular beam epitoxy; chemical deposition, including vapor and liquid phases; innovative deposition processes; plasma processing for both etching and deposition; and integration as it relates to the interactions among consecutive and non-consecutive unit operations. Top experts in electronic chemical and materials processing will be invited to attend the workshop.

将为“电子材料加工的工程研究需求”研讨会提供支持。它的目标是确定电子材料加工中的远程工程研究需求和机会。研讨会将使学术研究界认识到研究可以应用于新技术和新兴技术的哪些领域，并协助国家科学基金会管理层在这一基础研究领域未来规划和评估工作的可能重点。应邀与会者将评估以下方面目前的认识和能力：薄膜形成，包括简单蒸发和分子束外延；化学沉积，包括汽相和液态；创新沉积工艺；用于蚀刻和沉积的等离子处理；以及一体化，因为它涉及连续和非连续单元操作之间的相互作用。电子化工和材料加工领域的顶尖专家将应邀参加研讨会。