Workshop: Engineering Research Needs for Electronic Materials Processing; to be held in Newark, Delaware June 24-25, 1985

将为“工程研究需求”研讨会提供支持 电子材料加工。“其目的是确定 电子领域的长期工程研究需求和机会 材料加工 讲习班将提高人们的认识， 学术研究社区，研究可以应用于新的 和新兴技术，并协助NSF管理， 未来规划和评估工作的重点 基础研究。 受邀与会者将评估目前的 理解和能力：薄膜形成，包括 简单蒸发和分子束外延;化学沉积， 包括气相和液相;创新的沉积工艺; 用于蚀刻和沉积两者的等离子体处理;以及 它涉及到连续和非连续之间的相互作用 单位业务。 电子化学和材料领域的顶尖专家 加工将应邀参加研讨会。

Support will be provided to the workshop on 'Engineering Research Needs for Electronic Materials Processing.' Its objective is to identify the long-range engineering research needs and opportunities in electronic materials processing. The workshop will create an awareness in the academic research community as to where research can be applied in new and emerging technologies and to assist NSF management in the possible focus of future planning and assessment efforts in this area of fundamental research. Invited participants will evaluate the present understanding and capabilities of: thin-film formation, including simple evaporation and molecular beam epitoxy; chemical deposition, including vapor and liquid phases; innovative deposition processes; plasma processing for both etching and deposition; and integration as it relates to the interactions among consecutive and non-consecutive unit operations. Top experts in electronic chemical and materials processing will be invited to attend the workshop.