Workshop: Engineering Research Needs for Electronic Materials Processing; to be held in Newark, Delaware June 24-25, 1985

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Support will be provided to the workshop on 'Engineering Research Needs for Electronic Materials Processing.' Its objective is to identify the long-range engineering research needs and opportunities in electronic materials processing. The workshop will create an awareness in the academic research community as to where research can be applied in new and emerging technologies and to assist NSF management in the possible focus of future planning and assessment efforts in this area of fundamental research. Invited participants will evaluate the present understanding and capabilities of: thin-film formation, including simple evaporation and molecular beam epitoxy; chemical deposition, including vapor and liquid phases; innovative deposition processes; plasma processing for both etching and deposition; and integration as it relates to the interactions among consecutive and non-consecutive unit operations. Top experts in electronic chemical and materials processing will be invited to attend the workshop.