Microwave Plasma Generation and Applications

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This research program is on microwave production of a hot plasma in a magnetic-mirror trap, and the application of this plasma as an x-ray or ion source. The areas of application to be studied are x-ray lithography in solid-state circuit production and multiply-charged ion production for ion beams. The plasma is produced and heated by electron cyclotron resonance heating. The generation of a non- Maxwellian electron velocity distribution by cyclotron heating will be studied experimentally and by computer simulation. Electron cyclotron emission will be used as a diagnostic. The average energy and flux of x-ray radiation from the plasma will be evaluated for lithography applications. The confinement properties and behavior of the plasma in a minimum-B magnetic field will be correlated with its performance as an ion source.