Design and Development of a Novel CVD Reactor
新型CVD反应器的设计与开发
基本信息
- 批准号:8712171
- 负责人:
- 金额:--
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:1987
- 资助国家:美国
- 起止时间:1987-05-15 至 1989-04-30
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The PI plans to build and test a novel chemical vagor deposition (CVD) reactor consisting of five parts in a rectangular cell. The proposed reactor is totally different from those presently in commerical use. By operating the reactor at a low pressure a stagnant fluid medium of constant temperature will be provided for film deposition in the absence of buoyancy-driven free convection. The supply of source gas for the deposition will be by diffusion rather than forced convection or flowing fluid. Experimental work will be done first to see if the reactor is viable. Then, based on this prototype the governing design equations will be tested over wide ranges of operating conditions and modified to establish a reliable set of design relationships. Once the concept and design of the novel reactor are demonstrated on the basis of silicon epitaxy and polysilicon deposition, the use of the reactor for superlattice film growth will be tried. Superlattice structures with very sharp interfaces between alternating layers will be grown by using two of the reactors side by side with the deposition zones interconnected by a corridor.
PI计划建立和测试一种新的化学vagor 沉积(CVD)反应器,由五个部分组成, 矩形细胞 拟议中的反应堆完全不同 与目前使用的药物不同。 通过操作 反应器在低压下,恒定的停滞流体介质 将提供温度用于膜沉积, 浮力驱动的自由对流。 气源供应 因为沉积将通过扩散而不是强制 对流或流动流体。 实验工作将在 先看看反应堆是否可行 那么根据这个 原型,控制设计方程将被测试 广泛的操作条件和修改,以建立一个 可靠的设计关系。 一旦概念和 设计的新型反应器的基础上, 硅外延和多晶硅沉积,使用 将尝试用于超晶格膜生长的反应器。 超晶格结构之间具有非常尖锐的界面, 交替层将通过使用两个反应器生长 与沉积区并排, 走廊
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Hong Lee其他文献
Evaluating the comparative MT1B, MT1F, MT1G, and MT1H expression in human pulmonary alveolar epithelial cells treated with polyhexamethylene guanidine-phosphate, chloromethylisothiazolinone/methylisothiazolinone, oligo(2-(2-ethoxy)ethoxyethyl guanidinium chloride, benzalkonium chloride, and sodium dichloroisocyanurate
- DOI:
10.1007/s13273-022-00311-4 - 发表时间:
2022-11-16 - 期刊:
- 影响因子:1.400
- 作者:
Jaeyoung Kim;Yong-Wook Baek;Cherry Kim;Yoon Jeong Nam;Yu-Seon Lee;Hong Lee;Ja Young Kang;Hyejin Lee;Jin Young Choi;Yoon Hee Park;Su A. Park;Eun-Kee Park;Sang Hoon Jeong;Ju-Han Lee - 通讯作者:
Ju-Han Lee
Universal Welfare May Be Costly: Evidence from School Meal Programs and Student Fitness in South Korea
全民福利可能代价高昂:来自韩国学校供餐计划和学生健身的证据
- DOI:
- 发表时间:
2019 - 期刊:
- 影响因子:3.9
- 作者:
Deokrye Baek;Yongjun Choi;Hong Lee - 通讯作者:
Hong Lee
Deciphering the toxicity of polyhexamethylene guanidine phosphate in lung carcinogenesis: Mutational profiles and molecular mechanisms
- DOI:
10.1016/j.chemosphere.2024.143785 - 发表时间:
2024-11-01 - 期刊:
- 影响因子:
- 作者:
Hong Lee;Sang Hoon Jeong;Yong-Wook Baek;Hyejin Lee;Jason K. Sa;Ji Yoon Lee;Yu-Seon Lee;Yoon Jeong Nam;Jaeyoung Kim;Jonghoon Kim;Jin Young Choi;Su A. Park;Je Hyeong Kim;Yoon Hee Park;Jungyun Lim;Young-Hee Kim;Eun-Kee Park;Cherry Kim;Ju-Han Lee - 通讯作者:
Ju-Han Lee
Do People Use Their Implicit Theories of Creativity as General Theories
人们是否将他们的内隐创造力理论用作一般理论
- DOI:
- 发表时间:
2015 - 期刊:
- 影响因子:0
- 作者:
Hong Lee;Jungsik Kim;Yeonjae Ryu;S. Song - 通讯作者:
S. Song
PO-05-238 strongBRASH SYNDROME: A RARE BUT REVERSIBLE CAUSE OF SINUS NODE DYSFUNCTION/strong
PO-05-238 暴发性综合征:一种罕见但可逆的窦房结功能障碍原因
- DOI:
10.1016/j.hrthm.2023.03.1428 - 发表时间:
2023-05-01 - 期刊:
- 影响因子:5.700
- 作者:
Adam Habib;Khurram Butt;Hong Lee - 通讯作者:
Hong Lee
Hong Lee的其他文献
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{{ truncateString('Hong Lee', 18)}}的其他基金
U.S.-Korea Cooperative Research on the Effects of Pore Size on Deactivation of Nickel Catalyst
美韩合作研究孔径对镍催化剂失活的影响
- 批准号:
9002601 - 财政年份:1990
- 资助金额:
-- - 项目类别:
Standard Grant
Output Intensity Limit of Semiconductor Lasers
半导体激光器的输出强度极限
- 批准号:
8907873 - 财政年份:1989
- 资助金额:
-- - 项目类别:
Continuing grant
U.S.-Korea Long-Term Visit for Cooperative Research on the Kinetics of Catalyst Sintering
美韩长期访问催化剂烧结动力学合作研究
- 批准号:
8819246 - 财政年份:1989
- 资助金额:
-- - 项目类别:
Standard Grant
Development of Kinetics of Sintering for Porous Supported Catalysts: Crystallite Migration and Effect of Catalyst Preparation
多孔负载催化剂烧结动力学研究进展:晶粒迁移和催化剂制备的影响
- 批准号:
8601884 - 财政年份:1986
- 资助金额:
-- - 项目类别:
Standard Grant
Development of Kinetics of Sintering in Porous, Supported Catalysts: Atomic Migration
多孔负载催化剂中烧结动力学的发展:原子迁移
- 批准号:
8318721 - 财政年份:1984
- 资助金额:
-- - 项目类别:
Standard Grant
Modeling and Optimization of a Fixed-Bed Reactor Under the Conditions of Catalyst Sintering
催化剂烧结条件下固定床反应器的建模与优化
- 批准号:
8104713 - 财政年份:1981
- 资助金额:
-- - 项目类别:
Continuing grant
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