Fast Precision Robust Control of Resonant Flexible Systems

该项目旨在开发新的控制系统设计工具，以实现对包含柔性结构的先进工程系统的快速精确控制。这应该能够提高速度和精度的控制系统的精密仪器，如原子力显微镜，沿着提高控制系统的性能，精密工程领域，如半导体制造，机器人和微机电系统。其成果预计将是新的控制系统合成和建模工具，使快速和高度准确的控制工业系统使用非线性和开关元件，并实现高水平的鲁棒性。这将有利于澳大利亚的精密制造业。

The project aims to produce new control system design tools to enable fast precision control of advanced engineering systems encorporating flexible structures. This should enable improved speed and accuracy in control systems for precision instruments such as atomic force microscopes along with improving control system performance in areas of precision engineering such as semiconductor manufacturing, robotics and microelectromechanical systems. The outcomes are expected to be new control system synthesis and modelling tools enabling fast and highly accurate control of industrial systems using nonlinear and switching elements and achieving high levels of robustness. This will benefit Australian precision manufacturing industries.