Engineering Research Equipment Grant: (a) Optical Multichannel Analyzer and (b) Excimer Laser for Fundamental Studies of LCV Deposition of Titanium

工程研究设备补助金：(a) 光学多通道分析仪和 (b) 准分子激光器，用于钛的 LCV 沉积的基础研究

• 批准号: 8807923
• 负责人: Jyotirmoy Mazumder
• 金额: $ 6.89万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-06-01 至 1989-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8807923&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Grant; Optical

This equipment grant is provided to purchase an optical multichannel analyzer and an Excimer Laser. The optical multichannel analyzer will be used for spectroscopic diagnostics of the laser chemical vapor deposition (LCVD) reaction to determine temperature and chemistry at the interaction point. The Excimer Laser will be used to develop a laser induced fluorescent method to determine reaction product and reactant concentration distribution and flow at the interaction region. This will provide insight into the rate of mass transport in this process.

该设备赠款用于购买光学多通道 分析仪和准分子激光器。 光学多道分析仪 将用于激光化学的光谱诊断 气相沉积（LCVD）反应以确定温度， 化学反应在相互作用点。 将使用准分子激光器 建立了一种激光诱导荧光法测定反应 产品和反应物的浓度分布和流动， 相互作用区 这将提供对质量速率的洞察力 运输在这个过程中。