Engineering Research Equipment Grant: (a) Optical Multichannel Analyzer and (b) Excimer Laser for Fundamental Studies of LCV Deposition of Titanium

这笔设备补助金用于购买一台光学多通道分析仪和一台准分子激光器。光学多通道分析仪将用于激光化学气相沉积（LCVD）反应的光谱诊断，以确定相互作用点的温度和化学性质。准分子激光将用于开发激光诱导荧光方法，以确定反应产物和反应物的浓度分布和相互作用区域的流动。这将提供对这一过程中质量传输速率的深入了解。

This equipment grant is provided to purchase an optical multichannel analyzer and an Excimer Laser. The optical multichannel analyzer will be used for spectroscopic diagnostics of the laser chemical vapor deposition (LCVD) reaction to determine temperature and chemistry at the interaction point. The Excimer Laser will be used to develop a laser induced fluorescent method to determine reaction product and reactant concentration distribution and flow at the interaction region. This will provide insight into the rate of mass transport in this process.