Expedited Award for Novel Research: New Laser-Based Method for Manufacturing High Temperature Superconducting Films

本项目研究的是一种制备高温超导陶瓷材料薄膜的技术。薄膜的沉积将在高真空系统中进行。超导材料的元素靶将使用准分子激光从旋转的靶架上依次蒸发。沉积薄膜的成分将使用石英谐振器微天平和计算机控制进行现场监测和控制。超导材料薄膜在电子和计算机领域有着广泛的应用。

This project deals with a manufacturing technique for depositing thin films of high-temperature superconducting ceramic materials of the type yttrium-barium-copper-oxygen compound. Deposition of the film will be done in a high-vacuum system. Elemental targets of the superconducting material will be sequentally evaporated from a rotating target holder using an Excimer laser. The composition of the deposited film will be monitored and controlled in situ using a quartz resonator microbalance and a computer control. Thin films of superconducting materials have applications in the electronic and computer applications.